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Takuro Makisako
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Kirishima-shi, JP
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last 30 patents
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Patent Grant
Piezoelectric actuator and mass flow controller provided with same
Patent number
9,455,398
Issue date
Sep 27, 2016
KYOCERA Corporation
Takuro Makisako
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
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Patent Application
PIEZOELECTRIC ACTUATOR AND MASS FLOW CONTROLLER PROVIDED WITH SAME
Publication number
20150179920
Publication date
Jun 25, 2015
KYOCERA CORPORATION
Takuro Makisako
H01 - BASIC ELECTRIC ELEMENTS