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last 30 patents
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Patent Grant
Substrate processing method, recording medium and substrate process...
Patent number
11,201,050
Issue date
Dec 14, 2021
Tokyo Electron Limited
Itaru Kanno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method, recording medium and substrate process...
Patent number
11,133,176
Issue date
Sep 28, 2021
Tokyo Electron Limited
Kento Tsukano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of cleaning substrate processing apparatus and system of cle...
Patent number
10,950,465
Issue date
Mar 16, 2021
Tokyo Electron Limited
Shotaro Kitayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid processing method, substrate processing apparatus, and stora...
Patent number
10,867,814
Issue date
Dec 15, 2020
Tokyo Electron Limited
Yosuke Kawabuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid processing method, substrate processing apparatus and record...
Patent number
10,727,042
Issue date
Jul 28, 2020
Tokyo Electron Limited
Mitsunori Nakamori
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Substrate processing apparatus
Patent number
10,692,739
Issue date
Jun 23, 2020
Tokyo Electron Limited
Yosuke Kawabuchi
F26 - DRYING
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Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
10,504,718
Issue date
Dec 10, 2019
Tokyo Electron Limited
Hiroki Ohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and re...
Patent number
10,395,950
Issue date
Aug 27, 2019
Tokyo Electron Limited
Gentaro Goshi
B08 - CLEANING
Information
Patent Grant
Processing apparatus, processing method, and storage medium
Patent number
10,261,521
Issue date
Apr 16, 2019
Tokyo Electron Limited
Keigo Satake
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
BONDING METHOD AND BONDING SYSTEM
Publication number
20240395573
Publication date
Nov 28, 2024
TOKYO ELECTRON LIMITED
Atsushi Nagata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE MODIFYING METHOD AND SURFACE MODIFYING APPARATUS
Publication number
20240079214
Publication date
Mar 7, 2024
TOKYO ELECTRON LIMITED
Yuji Mimura
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SURFACE MODIFYING APPARATUS AND BONDING STRENGTH DETERMINATION METHOD
Publication number
20240079222
Publication date
Mar 7, 2024
TOKYO ELECTRON LIMITED
Takashi Terada
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESSING METHOD, RECORDING MEDIUM AND SUBSTRATE PROCESS...
Publication number
20190355574
Publication date
Nov 21, 2019
TOKYO ELECTRON LIMITED
Itaru Kanno
F26 - DRYING
Information
Patent Application
SUBSTRATE PROCESSING METHOD, RECORDING MEDIUM AND SUBSTRATE PROCESS...
Publication number
20190051519
Publication date
Feb 14, 2019
TOKYO ELECTRON LIMITED
Kento Tsukano
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20180254200
Publication date
Sep 6, 2018
TOKYO ELECTRON LIMITED
Yosuke Kawabuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20180254180
Publication date
Sep 6, 2018
TOKYO ELECTRON LIMITED
Gentaro Goshi
B08 - CLEANING
Information
Patent Application
METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS AND SYSTEM OF CLE...
Publication number
20180158699
Publication date
Jun 7, 2018
TOKYO ELECTRON LIMITED
Shotaro Kitayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
Publication number
20180138058
Publication date
May 17, 2018
TOKYO ELECTRON LIMITED
Keisuke Egashira
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
Publication number
20180138035
Publication date
May 17, 2018
TOKYO ELECTRON LIMITED
Hiroki Ohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RE...
Publication number
20180130675
Publication date
May 10, 2018
TOKYO ELECTRON LIMITED
Gentaro Goshi
B08 - CLEANING
Information
Patent Application
LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND RECORD...
Publication number
20180040471
Publication date
Feb 8, 2018
TOKYO ELECTRON LIMITED
Mitsunori Nakamori
B08 - CLEANING
Information
Patent Application
LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORA...
Publication number
20170236729
Publication date
Aug 17, 2017
TOKYO ELECTRON LIMITED
Yosuke Kawabuchi
B08 - CLEANING
Information
Patent Application
PROCESSING APPARATUS, PROCESSING METHOD, AND STORAGE MEDIUM
Publication number
20160370810
Publication date
Dec 22, 2016
TOKYO ELECTRON LIMITED
Keigo Satake
G05 - CONTROLLING REGULATING
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Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
Publication number
20140373877
Publication date
Dec 25, 2014
Shigehisa Inoue
B08 - CLEANING