Takuro Tsujikawa

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Measurement method, measurement apparatus, lithography apparatus, a...
- Patent number 10,460,433
- Issue date Oct 29, 2019
- Canon Kabushiki Kaisha
- Takuro Tsujikawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Lithography apparatus and article manufacturing method
- Patent number 10,120,294
- Issue date Nov 6, 2018
- Canon Kabushiki Kaisha
- Takuro Tsujikawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection apparatus, lithography apparatus, method of manufacturing...
- Patent number 10,095,124
- Issue date Oct 9, 2018
- Canon Kabushiki Kaisha
- Takuro Tsujikawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 9,575,413
- Issue date Feb 21, 2017
- Canon Kabushiki Kaisha
- Takuro Tsujikawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mark position detection device and mark position detection method,...
- Patent number 8,339,570
- Issue date Dec 25, 2012
- Canon Kabushiki Kaisha
- Takuro Tsujikawa
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20180329294
- Publication date Nov 15, 2018
- Canon Kabushiki Kaisha
- Takuro Tsujikawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT METHOD, MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, A...
- Publication number 20170278233
- Publication date Sep 28, 2017
- Canon Kabushiki Kaisha
- Takuro Tsujikawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING...
- Publication number 20170005017
- Publication date Jan 5, 2017
- Canon Kabushiki Kaisha
- Takuro Tsujikawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20160139513
- Publication date May 19, 2016
- Canon Kabushiki Kaisha
- Takuro Tsujikawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20150338746
- Publication date Nov 26, 2015
- Canon Kabushiki Kaisha
- Takuro Tsujikawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MARK POSITION DETECTION DEVICE AND MARK POSITION DETECTION METHOD,...
- Publication number 20100271609
- Publication date Oct 28, 2010
- Canon Kabushiki Kaisha
- Takuro Tsujikawa
- G01 - MEASURING TESTING

Takuro Tsujikawa

Person

Patents Grantslast 30 patents

Measurement method, measurement apparatus, lithography apparatus, a...

Lithography apparatus and article manufacturing method

Detection apparatus, lithography apparatus, method of manufacturing...

Exposure apparatus, exposure method, and device manufacturing method

Mark position detection device and mark position detection method,...

Patents Applicationslast 30 patents

LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE

MEASUREMENT METHOD, MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, A...

DETECTION APPARATUS, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING...

LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

MARK POSITION DETECTION DEVICE AND MARK POSITION DETECTION METHOD,...