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Takuro Tsutsui
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Sapporo City, JP
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last 30 patents
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Patent Grant
Substrate state determining apparatus, substrate processing apparat...
Patent number
11,598,007
Issue date
Mar 7, 2023
Tokyo Electron Limited
Nao Akashi
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, DATA PROCESSING METHOD, AND DATA PR...
Publication number
20240272592
Publication date
Aug 15, 2024
TOKYO ELECTRON LIMITED
Takuro TSUTSUI
G05 - CONTROLLING REGULATING
Information
Patent Application
INFERENCE DEVICE, INFERENCE METHOD AND INFERENCE PROGRAM
Publication number
20230004837
Publication date
Jan 5, 2023
TOKYO ELECTRON LIMITED
Takuro TSUTSUI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
STATE DETERMINATION DEVICE, STATE DETERMINATION METHOD, AND COMPUTE...
Publication number
20220223443
Publication date
Jul 14, 2022
TOKYO ELECTRON LIMITED
Junnosuke MAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VIRTUAL METROLOGY APPARATUS, VIRTUAL METROLOGY METHOD, AND VIRTUAL...
Publication number
20220011747
Publication date
Jan 13, 2022
TOKYO ELECTRON LIMITED
Takuro TSUTSUI
G05 - CONTROLLING REGULATING
Information
Patent Application
ABNORMALITY DETECTING DEVICE AND ABNORMALITY DETECTING METHOD
Publication number
20210166120
Publication date
Jun 3, 2021
TOKYO ELECTRON LIMITED
Takuro TSUTSUI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PREDICTING DEVICE AND PREDICTING METHOD
Publication number
20210166121
Publication date
Jun 3, 2021
TOKYO ELECTRON LIMITED
Takuro TSUTSUI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE STATE DETERMINING APPARATUS, SUBSTRATE PROCESSING APPARAT...
Publication number
20200080202
Publication date
Mar 12, 2020
TOKYO ELECTRON LIMITED
Nao Akashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...