Takushi Yoshida

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate treating system, substrate treating device, program, and...
- Patent number 8,052,834
- Issue date Nov 8, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Takushi Yoshida
- B08 - CLEANING
Information Patent Grant
System for and method of processing substrate
- Patent number 6,807,455
- Issue date Oct 19, 2004
- Dainippon Screen Mfg. Co. Ltd.
- Takushi Yoshida
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
Substrate treating system, substrate treating device, program, and...
- Publication number 20060151112
- Publication date Jul 13, 2006
- Takushi Yoshida
- B08 - CLEANING
Information Patent Application
System for and method of processing substrate
- Publication number 20040002784
- Publication date Jan 1, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Takushi Yoshida
- G05 - CONTROLLING REGULATING