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Yamanashi, JP
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Patents Grants
last 30 patents
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Patent Grant
Etching method
Patent number
11,127,597
Issue date
Sep 21, 2021
Tokyo Electron Limited
Reiko Sasahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and etching apparatus
Patent number
11,024,514
Issue date
Jun 1, 2021
Tokyo Electron Limited
Takuya Abe
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
10,622,205
Issue date
Apr 14, 2020
Tokyo Electron Limited
Hiroyuki Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ETCHING METHOD
Publication number
20200111674
Publication date
Apr 9, 2020
TOKYO ELECTRON LIMITED
Reiko SASAHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20200035504
Publication date
Jan 30, 2020
TOKYO ELECTRON LIMITED
Takuya ABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Processing Method and Substrate Processing Apparatus
Publication number
20190181015
Publication date
Jun 13, 2019
TOKYO ELECTRON LIMITED
Tomoaki OGIWARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20170294319
Publication date
Oct 12, 2017
TOKYO ELECTRON LIMITED
Tomoaki OGIWARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20160236244
Publication date
Aug 18, 2016
TOKYO ELECTRON LIMITED
Hiroyuki TAKAHASHI
B08 - CLEANING