Takuya Fujiwara

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Processing gas supplying system and processing gas supplying method
- Patent number 8,261,762
- Issue date Sep 11, 2012
- Tokyo Electron Limited
- Kiyoshi Komiyama
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING GAS SUPPLYING SYSTEM AND PROCESSING GAS SUPPLYING METHOD
- Publication number 20090170332
- Publication date Jul 2, 2009
- TOKYO ELECTRON LIMITED
- Kiyoshi Komiyama
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS