Takuya ITAHASHI

Follow

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 12,070,769
- Issue date Aug 27, 2024
- Tokyo Electron Limited
- Chikara Nobukuni
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 11,691,172
- Issue date Jul 4, 2023
- Tokyo Electron Limited
- Chikara Nobukuni
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS M...
- Publication number 20240242978
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Shota UMEZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20230234091
- Publication date Jul 27, 2023
- TOKYO ELECTRON LIMITED
- Chikara NOBUKUNI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20210001370
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Chikara NOBUKUNI
- H01 - BASIC ELECTRIC ELEMENTS