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Takuya KAWAGUCHI

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  • Nirasaki City, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    STRESS REDUCING METHOD
    • Publication number 20230227969
    • Publication date Jul 20, 2023
    • TOKYO ELECTRON LIMITED
    • Takuya KAWAGUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND TUNGSTEN FILM
    • Publication number 20230227976
    • Publication date Jul 20, 2023
    • TOKYO ELECTRON LIMITED
    • Takuya KAWAGUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND DEVICE FOR FORMING TUNGSTEN FILM, AND DEVICE FOR FORMING...
    • Publication number 20230212738
    • Publication date Jul 6, 2023
    • Tokyo Electron Limited
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS FOR FORMING FILM ON SUBSTRATE AND METHOD FOR FORMING FILM...
    • Publication number 20230062123
    • Publication date Mar 2, 2023
    • TOKYO ELECTRON LIMITED
    • Toshio TAKAGI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220396875
    • Publication date Dec 15, 2022
    • TOKYO ELECTRON LIMITED
    • Takanobu HOTTA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220396876
    • Publication date Dec 15, 2022
    • TOKYO ELECTRON LIMITED
    • Takuya KAWAGUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS SUPPLY DEVICE AND GAS SUPPLY METHOD
    • Publication number 20220356581
    • Publication date Nov 10, 2022
    • Tokyo Electron Limited
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    RAW MATERIAL SUPPLY APPARATUS AND FILM FORMING APPARATUS
    • Publication number 20210324513
    • Publication date Oct 21, 2021
    • TOKYO ELECTRON LIMITED
    • Tomohisa KIMOTO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20210010130
    • Publication date Jan 14, 2021
    • TOKYO ELECTRON LIMITED
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...