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Takuya KAWAGUCHI
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Nirasaki City, JP
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Patents Grants
last 30 patents
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Patent Grant
Raw material supply apparatus and film forming apparatus
Patent number
11,873,556
Issue date
Jan 16, 2024
Tokyo Electron Limited
Tomohisa Kimoto
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
STRESS REDUCING METHOD
Publication number
20230227969
Publication date
Jul 20, 2023
TOKYO ELECTRON LIMITED
Takuya KAWAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND TUNGSTEN FILM
Publication number
20230227976
Publication date
Jul 20, 2023
TOKYO ELECTRON LIMITED
Takuya KAWAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND DEVICE FOR FORMING TUNGSTEN FILM, AND DEVICE FOR FORMING...
Publication number
20230212738
Publication date
Jul 6, 2023
Tokyo Electron Limited
Kensaku NARUSHIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR FORMING FILM ON SUBSTRATE AND METHOD FOR FORMING FILM...
Publication number
20230062123
Publication date
Mar 2, 2023
TOKYO ELECTRON LIMITED
Toshio TAKAGI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20220396875
Publication date
Dec 15, 2022
TOKYO ELECTRON LIMITED
Takanobu HOTTA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20220396876
Publication date
Dec 15, 2022
TOKYO ELECTRON LIMITED
Takuya KAWAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SUPPLY DEVICE AND GAS SUPPLY METHOD
Publication number
20220356581
Publication date
Nov 10, 2022
Tokyo Electron Limited
Kensaku NARUSHIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RAW MATERIAL SUPPLY APPARATUS AND FILM FORMING APPARATUS
Publication number
20210324513
Publication date
Oct 21, 2021
TOKYO ELECTRON LIMITED
Tomohisa KIMOTO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20210010130
Publication date
Jan 14, 2021
TOKYO ELECTRON LIMITED
Kensaku NARUSHIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...