TREA

Takuya KAWAGUCHI

Follow

Person

  • Nirasaki City, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Film forming method and tungsten film
    • Patent number 12,227,843
    • Issue date Feb 18, 2025
    • Tokyo Electron Limited
    • Takuya Kawaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Stress reducing method
    • Patent number 12,221,693
    • Issue date Feb 11, 2025
    • Tokyo Electron Limited
    • Takuya Kawaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Showerhead and substrate processing apparatus
    • Patent number 12,188,125
    • Issue date Jan 7, 2025
    • Tokyo Electron Limited
    • Takanobu Hotta
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Raw material supply apparatus and film forming apparatus
    • Patent number 11,873,556
    • Issue date Jan 16, 2024
    • Tokyo Electron Limited
    • Tomohisa Kimoto
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    STRESS REDUCING METHOD
    • Publication number 20230227969
    • Publication date Jul 20, 2023
    • TOKYO ELECTRON LIMITED
    • Takuya KAWAGUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND TUNGSTEN FILM
    • Publication number 20230227976
    • Publication date Jul 20, 2023
    • TOKYO ELECTRON LIMITED
    • Takuya KAWAGUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND DEVICE FOR FORMING TUNGSTEN FILM, AND DEVICE FOR FORMING...
    • Publication number 20230212738
    • Publication date Jul 6, 2023
    • Tokyo Electron Limited
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS FOR FORMING FILM ON SUBSTRATE AND METHOD FOR FORMING FILM...
    • Publication number 20230062123
    • Publication date Mar 2, 2023
    • TOKYO ELECTRON LIMITED
    • Toshio TAKAGI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220396875
    • Publication date Dec 15, 2022
    • TOKYO ELECTRON LIMITED
    • Takanobu HOTTA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220396876
    • Publication date Dec 15, 2022
    • TOKYO ELECTRON LIMITED
    • Takuya KAWAGUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS SUPPLY DEVICE AND GAS SUPPLY METHOD
    • Publication number 20220356581
    • Publication date Nov 10, 2022
    • Tokyo Electron Limited
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    RAW MATERIAL SUPPLY APPARATUS AND FILM FORMING APPARATUS
    • Publication number 20210324513
    • Publication date Oct 21, 2021
    • TOKYO ELECTRON LIMITED
    • Tomohisa KIMOTO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20210010130
    • Publication date Jan 14, 2021
    • TOKYO ELECTRON LIMITED
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...