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Takuya Kono
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Yokosuka-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Imprint apparatus and imprint method
Patent number
12,078,925
Issue date
Sep 3, 2024
Kioxia Corporation
Kazuya Fukuhara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
Patent number
11,333,969
Issue date
May 17, 2022
Canon Kabushiki Kaisha
Keiji Yamashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
Patent number
10,168,615
Issue date
Jan 1, 2019
Canon Kabushiki Kaisha
Keiji Yamashita
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Imprint method and imprint system
Patent number
9,541,847
Issue date
Jan 10, 2017
Kabushiki Kaisha Toshiba
Masato Suzuki
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Fine processing method, fine processing apparatus, and recording me...
Patent number
9,377,777
Issue date
Jun 28, 2016
Kabushiki Kaisha Toshiba
Yasutada Nakagawa
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Fine processing method, fine processing apparatus, and recording me...
Patent number
8,691,123
Issue date
Apr 8, 2014
Kabushiki Kaisha Toshiba
Yasutada Nakagawa
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Template and method of manufacturing a semiconductor device
Patent number
8,647,106
Issue date
Feb 11, 2014
Kabushiki Kaisha Toshiba
Ryoichi Inanami
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Immersion lithography apparatus and exposure method
Patent number
7,889,313
Issue date
Feb 15, 2011
Kabushiki Kaisha Toshiba
Makiko Katano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion exposure apparatus and method of manufacturing a semicond...
Patent number
7,804,580
Issue date
Sep 28, 2010
Kabushiki Kaisha Toshiba
Takuya Kono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Surface position measuring system, exposure method and semiconducto...
Patent number
7,710,583
Issue date
May 4, 2010
Kabushiki Kaisha Toshiba
Takuya Kono
G01 - MEASURING TESTING
Information
Patent Grant
Immersion exposure method and immersion exposure apparatus which tr...
Patent number
7,652,747
Issue date
Jan 26, 2010
Kabushiki Kaisha Toshiba
Takuya Kono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure processing system, exposure processing method and method f...
Patent number
7,630,052
Issue date
Dec 8, 2009
Kabushiki Kaisha Toshiba
Takuya Kono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for controlling an overlay, method for controlling overlay,...
Patent number
7,556,899
Issue date
Jul 7, 2009
Kabushiki Kaisha Toshiba
Makoto Ikeda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion exposure method and apparatus, and manufacturing method o...
Patent number
7,423,728
Issue date
Sep 9, 2008
Kabushiki Kaisha Toshiba
Kentaro Matsunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and program for making recipe and method for manufacturing p...
Patent number
7,260,443
Issue date
Aug 21, 2007
Kabushiki Kaisha Toshiba
Hiroyuki Morinaga
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Displacement correction apparatus, exposure system, exposure method...
Patent number
7,046,334
Issue date
May 16, 2006
Kabushiki Kaisha Toshiba
Takuya Kono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of measuring aberration of projection optics
Patent number
6,011,611
Issue date
Jan 4, 2000
Kabushiki Kaisha Toshiba
Hiroshi Nomura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
IMPRINT APPARATUS AND IMPRINT METHOD
Publication number
20220252975
Publication date
Aug 11, 2022
KIOXIA Corporation
Kazuya FUKUHARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
Publication number
20190101824
Publication date
Apr 4, 2019
Canon Kabushiki Kaisha
Keiji Yamashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMPRINT APPARATUS AND IMPRINT METHOD
Publication number
20190079391
Publication date
Mar 14, 2019
Toshiba Memory Corporation
Kazuya FUKUHARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
Publication number
20150014877
Publication date
Jan 15, 2015
Canon Kabushiki Kaisha
Keiji Yamashita
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
Publication number
20150014876
Publication date
Jan 15, 2015
Canon Kabushiki Kaisha
Keiji Yamashita
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
FINE PROCESSING METHOD, FINE PROCESSING APPARATUS, AND RECORDING ME...
Publication number
20140200704
Publication date
Jul 17, 2014
KABUSHIKI KAISHA TOSHIBA
Yasutada NAKAGAWA
B82 - NANO-TECHNOLOGY
Information
Patent Application
IMPRINT METHOD AND IMPRINT SYSTEM
Publication number
20130020741
Publication date
Jan 24, 2013
Masato SUZUKI
B82 - NANO-TECHNOLOGY
Information
Patent Application
FINE PROCESSING METHOD, FINE PROCESSING APPARATUS, AND RECORDING ME...
Publication number
20120074605
Publication date
Mar 29, 2012
Kabushiki Kaisha Toshiba
Yasutada NAKAGAWA
G05 - CONTROLLING REGULATING
Information
Patent Application
TEMPLATE CHUCK, IMPRINT APPARATUS, AND PATTERN FORMING METHOD
Publication number
20120061875
Publication date
Mar 15, 2012
Takuya KONO
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
TEMPLATE REPAIR METHOD, PATTERN FORMING METHOD, AND TEMPLATE REPAIR...
Publication number
20110266705
Publication date
Nov 3, 2011
Shinichi ITO
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE SYSTEM, AND METHOD OF MANUFACTURING SE...
Publication number
20110032501
Publication date
Feb 10, 2011
Kazuya FUKUHARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE AND IMPRINT DEVICE
Publication number
20100320631
Publication date
Dec 23, 2010
Masaru Suzuki
B82 - NANO-TECHNOLOGY
Information
Patent Application
PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD
Publication number
20100308485
Publication date
Dec 9, 2010
Ryoichi INANAMI
B82 - NANO-TECHNOLOGY
Information
Patent Application
TEMPLATE AND PATTERN FORMING METHOD
Publication number
20100308513
Publication date
Dec 9, 2010
Hiroyuki Kashiwagi
B82 - NANO-TECHNOLOGY
Information
Patent Application
TEMPLATE, METHOD OF MANUFACTURING THE SAME, AND METHOD OF FORMING P...
Publication number
20100264113
Publication date
Oct 21, 2010
Ikuo YONEDA
B82 - NANO-TECHNOLOGY
Information
Patent Application
SUBSTRATE HOLDING MEMBER, IMMERSION TYPE EXPOSURE DEVICE AND METHOD...
Publication number
20100136796
Publication date
Jun 3, 2010
Masayuki HATANO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMMERSION LITHOGRAPHY METHOD
Publication number
20090296054
Publication date
Dec 3, 2009
Takuya KONO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE METHOD, PHOTO MASK, AND RETICLE STAGE
Publication number
20090148782
Publication date
Jun 11, 2009
Takuya Kono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMMERSION EXPOSURE APPARATUS AND METHOD OF MANUFACTURING A SEMICOND...
Publication number
20080278703
Publication date
Nov 13, 2008
Takuya Kono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD AND LITHOGRAPHY SYSTEM
Publication number
20080204685
Publication date
Aug 28, 2008
Takuya Kono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Immersion Lithography Apparatus and Exposure Method
Publication number
20080106713
Publication date
May 8, 2008
Makiko Katano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Surface position measuring system, exposure method and semiconducto...
Publication number
20080100843
Publication date
May 1, 2008
Takuya Kono
G01 - MEASURING TESTING
Information
Patent Application
Exposure apparatus and semiconductor device manufacturing method
Publication number
20070268467
Publication date
Nov 22, 2007
Makiko Katano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Immersion exposure apparatus and method of manufacturing semiconduc...
Publication number
20070096764
Publication date
May 3, 2007
Takuya Kono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus correction system, exposure apparatus correcting...
Publication number
20070020537
Publication date
Jan 25, 2007
Shoichi Harakawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Immersion exposure method and immersion exposure apparatus which tr...
Publication number
20070008507
Publication date
Jan 11, 2007
Takuya Kono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System for controlling an overlay, method for controlling overlay,...
Publication number
20060265686
Publication date
Nov 23, 2006
Makoto Ikeda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Immersion exposure method and apparatus, and manufacturing method o...
Publication number
20060177776
Publication date
Aug 10, 2006
Kentaro Matsunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and program for making recipe and method for manufacturing p...
Publication number
20060020362
Publication date
Jan 26, 2006
Hiroyuki Morinaga
G05 - CONTROLLING REGULATING
Information
Patent Application
Exposure system and method for manufacturing semiconductor device
Publication number
20060001846
Publication date
Jan 5, 2006
Takuya Kono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY