Takuya Kouno

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Aligner evaluation system, aligner evaluation method, a computer pr...
- Patent number 7,546,178
- Issue date Jun 9, 2009
- Kabushiki Kaisha Toshiba
- Takuya Kouno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Aligner evaluation system, aligner evaluation method, a computer pr...
- Patent number 7,269,470
- Issue date Sep 11, 2007
- Kabushiki Kaisha Toshiba
- Takuya Kouno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Design system of alignment marks for semiconductor manufacture
- Patent number 7,100,146
- Issue date Aug 29, 2006
- Kabushiki Kaisha Toshiba
- Takashi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, reticle, and method of manufacturing semiconductor...
- Patent number 6,558,852
- Issue date May 6, 2003
- Kabushiki Kaisha Toshiba
- Kazuo Tawarayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Aberration measuring method, aberration measuring system and aberra...
- Patent number 6,437,858
- Issue date Aug 20, 2002
- Kabushiki Kaisha Toshiba
- Takuya Kouno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus, aberration measuring method and aberration mea...
- Patent number 6,163,376
- Issue date Dec 19, 2000
- Kabushiki Kaisha Toshiba
- Hiroshi Nomura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Aligner evaluation system, aligner evaluation method, a computer pr...
- Publication number 20070288113
- Publication date Dec 13, 2007
- Kabushiki Kaisha Toshiba
- Takuya Kouno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Design system of alignment marks for semiconductor manufacture
- Publication number 20040207856
- Publication date Oct 21, 2004
- Takashi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Aligner evaluation system, aligner evaluation method, a computer pr...
- Publication number 20040088071
- Publication date May 6, 2004
- Takuya Kouno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Takuya Kouno

Person

Patents Grantslast 30 patents

Aligner evaluation system, aligner evaluation method, a computer pr...

Aligner evaluation system, aligner evaluation method, a computer pr...

Design system of alignment marks for semiconductor manufacture

Exposure method, reticle, and method of manufacturing semiconductor...

Aberration measuring method, aberration measuring system and aberra...

Alignment apparatus, aberration measuring method and aberration mea...

Patents Applicationslast 30 patents

Aligner evaluation system, aligner evaluation method, a computer pr...

Design system of alignment marks for semiconductor manufacture

Aligner evaluation system, aligner evaluation method, a computer pr...