Takuya Matsukawa

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Shizuoka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Pattern writing circuit self-diagnosis method for charged beam phot...
- Patent number 7,900,185
- Issue date Mar 1, 2011
- Nuflare Technology, Inc.
- Hayato Kimura
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Writing error diagnosis method for charged particle beam photolitho...
- Patent number 7,598,504
- Issue date Oct 6, 2009
- Nuflare Technology, Inc.
- Hayato Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle beam pattern writing method and apparatus and soft...
- Patent number 7,589,335
- Issue date Sep 15, 2009
- Nuflare Technology, Inc.
- Takuya Matsukawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PATTERN WRITING CIRCUIT SELF-DIAGNOSIS METHOD FOR CHARGED BEAM PHOT...
- Publication number 20080067426
- Publication date Mar 20, 2008
- NuFlare Technology, Inc.
- Hayato Kimura
- B82 - NANO-TECHNOLOGY
Information Patent Application
WRITING ERROR DIAGNOSIS METHOD FOR CHARGED PARTICLE BEAM PHOTOLITHO...
- Publication number 20080067423
- Publication date Mar 20, 2008
- NuFlare Technology, Inc.
- Hayato Kimura
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED-PARTICLE BEAM PATTERN WRITING METHOD AND APPARATUS AND SOFT...
- Publication number 20080011965
- Publication date Jan 17, 2008
- NuFlare Technology, Inc.
- Takuya Matsukawa
- B82 - NANO-TECHNOLOGY