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Takuya Matsushita
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Photomask, semiconductor device, and method for exposing through ph...
Patent number
6,617,080
Issue date
Sep 9, 2003
Mitsubishi Denki Kabushiki Kaisha
Toshihide Kawachi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
System for manufacturing semiconductor device utilizing photolithog...
Patent number
6,514,122
Issue date
Feb 4, 2003
Mitsubishi Denki Kabushiki Kaisha
Takayuki Saito
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
System for manufacturing semiconductor device utilizing photolithog...
Publication number
20020048857
Publication date
Apr 25, 2002
Mitsubishi Denki Kabushiki Kaisha
Takayuki Saito
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY