Takuya Oikawa

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Tokyo-To, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vertical thermal processing apparatus and method of using the same
- Patent number 7,935,188
- Issue date May 3, 2011
- Tokyo Electron Limited
- Wataru Nakajima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS
- Publication number 20240209507
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vertical Thermal Processing Apparatus and Method of Using the Same
- Publication number 20080187652
- Publication date Aug 7, 2008
- TOKYO ELECTRON LIMITED
- Wataru Nakajima
- H01 - BASIC ELECTRIC ELEMENTS