Takuya SAITO

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Toyama-shi, JP

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Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE CHECKING METHOD, METHOD O...
- Publication number 20240321612
- Publication date Sep 26, 2024
- Kokusai Electric Corporation
- Takuya SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240006200
- Publication date Jan 4, 2024
- Kokusai Electric Corporation
- Hiroshi HIROTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20230102035
- Publication date Mar 30, 2023
- Kokusai Electric Corporation
- Takuya SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE COOLING UNIT, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE P...
- Publication number 20220208587
- Publication date Jun 30, 2022
- Kokusai Electric Corporation
- Takuya SAITO
- H01 - BASIC ELECTRIC ELEMENTS