Takuya Sugawara

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of modifying insulating film
- Patent number 8,021,987
- Issue date Sep 20, 2011
- Tokyo Electron Limited
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of modifying insulating film
- Patent number 7,655,574
- Issue date Feb 2, 2010
- Tokyo Electron Limited
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for forming a nitrided germanium-containing layer...
- Patent number 7,517,812
- Issue date Apr 14, 2009
- Tokyo Electron Limited
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a nitrided germanium-containing layer using plas...
- Patent number 7,517,818
- Issue date Apr 14, 2009
- Tokyo Electron Limited
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MODIFYING INSULATING FILM
- Publication number 20100105215
- Publication date Apr 29, 2010
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for forming a nitrided germanium-containing layer...
- Publication number 20070099398
- Publication date May 3, 2007
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and system for forming a nitrided germanium-containing layer...
- Publication number 20070099435
- Publication date May 3, 2007
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of modifying insulating film
- Publication number 20060199398
- Publication date Sep 7, 2006
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS