Takuya TSUSHIMA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate drying apparatus
- Patent number 12,094,731
- Issue date Sep 17, 2024
- Ebara Corporation
- Hirotaka Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,027,402
- Issue date Jul 2, 2024
- Ebara Corporation
- Toshio Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding apparatus
- Patent number 11,658,058
- Issue date May 23, 2023
- Ebara Corporation
- Takahiro Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device that holds substrate in substrate holder and/or releases hol...
- Patent number 11,236,434
- Issue date Feb 1, 2022
- Ebara Corporation
- Takuya Tsushima
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate holder and plating apparatus
- Patent number 11,015,261
- Issue date May 25, 2021
- Ebara Corporation
- Yoshitaka Mukaiyama
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate processing device, method for controlling substrate proce...
- Patent number 10,991,605
- Issue date Apr 27, 2021
- Ebara Corporation
- Junitsu Yamakawa
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate attachment/detachment device, plating device, control dev...
- Patent number 10,665,495
- Issue date May 26, 2020
- Ebara Corporation
- Toshio Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device, method for controlling substrate proce...
- Patent number 10,163,672
- Issue date Dec 25, 2018
- Ebara Corporation
- Junitsu Yamakawa
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HOLDING APPARATUS
- Publication number 20210262109
- Publication date Aug 26, 2021
- EBARA CORPORATION
- Takahiro Abe
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE DRYING APPARATUS
- Publication number 20210249281
- Publication date Aug 12, 2021
- EBARA CORPORATION
- HIROTAKA OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210210368
- Publication date Jul 8, 2021
- EBARA CORPORATION
- Toshio Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE THAT HOLDS SUBSTRATE IN SUBSTRATE HOLDER AND/OR RELEASES HOL...
- Publication number 20200109485
- Publication date Apr 9, 2020
- EBARA CORPORATION
- TAKUYA TSUSHIMA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE PROCESSING DEVICE, METHOD FOR CONTROLLING SUBSTRATE PROCE...
- Publication number 20190181026
- Publication date Jun 13, 2019
- EBARA CORPORATION
- Junitsu YAMAKAWA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE HOLDER AND PLATING APPARATUS
- Publication number 20190084777
- Publication date Mar 21, 2019
- EBARA CORPORATION
- Yoshitaka MUKAIYAMA
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING DEVICE, METHOD FOR CONTROLLING SUBSTRATE PROCE...
- Publication number 20180286730
- Publication date Oct 4, 2018
- EBARA CORPORATION
- Junitsu YAMAKAWA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE ATTACHMENT/DETACHMENT DEVICE, PLATING DEVICE, CONTROL DEV...
- Publication number 20180182659
- Publication date Jun 28, 2018
- EBARA CORPORATION
- Toshio YOKOYAMA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Takuya TSUSHIMA

Person

Patents Grantslast 30 patents

Substrate drying apparatus

Substrate processing apparatus and substrate processing method

Substrate holding apparatus

Device that holds substrate in substrate holder and/or releases hol...

Substrate holder and plating apparatus

Substrate processing device, method for controlling substrate proce...

Substrate attachment/detachment device, plating device, control dev...

Substrate processing device, method for controlling substrate proce...

Patents Applicationslast 30 patents

SUBSTRATE HOLDING APPARATUS

SUBSTRATE DRYING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEVICE THAT HOLDS SUBSTRATE IN SUBSTRATE HOLDER AND/OR RELEASES HOL...

SUBSTRATE PROCESSING DEVICE, METHOD FOR CONTROLLING SUBSTRATE PROCE...

SUBSTRATE HOLDER AND PLATING APPARATUS

SUBSTRATE PROCESSING DEVICE, METHOD FOR CONTROLLING SUBSTRATE PROCE...

SUBSTRATE ATTACHMENT/DETACHMENT DEVICE, PLATING DEVICE, CONTROL DEV...