Takuya UMISE

Follow

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate accommodating unit and maintenance method for vacuum tran...
- Patent number 11,476,140
- Issue date Oct 18, 2022
- Tokyo Electron Limited
- Takuya Umise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate transfer method
- Patent number 11,189,514
- Issue date Nov 30, 2021
- Tokyo Electron Limited
- Takuya Umise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of processing workpiece in depressurized space
- Patent number 10,381,258
- Issue date Aug 13, 2019
- Tokyo Electron Limited
- Takuya Umise
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220336194
- Publication date Oct 20, 2022
- TOKYO ELECTRON LIMITED
- Hiroyuki YOKOHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD AND PROCESSING APPARATUS
- Publication number 20220328343
- Publication date Oct 13, 2022
- TOKYO ELECTRON LIMITED
- Takuya UMISE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE ACCOMMODATING UNIT AND MAINTENANCE METHOD FOR VACUUM TRAN...
- Publication number 20210134634
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Takuya UMISE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20210035838
- Publication date Feb 4, 2021
- TOKYO ELECTRON LIMITED
- Takuya UMISE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PROCESSING WORKPIECE IN DEPRESSURIZED SPACE
- Publication number 20170162424
- Publication date Jun 8, 2017
- TOKYO ELECTRON LIMITED
- Takuya UMISE
- H01 - BASIC ELECTRIC ELEMENTS