Tamaki Takeyama

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film thickness measuring apparatus and film thickness measuring met...
- Patent number 11,939,665
- Issue date Mar 26, 2024
- Tokyo Electron Limted
- Masato Shinada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus, cleaning method for film forming apparatus...
- Patent number 11,081,322
- Issue date Aug 3, 2021
- Tokyo Electron Limited
- Naotaka Noro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and recording medium
- Patent number 7,582,571
- Issue date Sep 1, 2009
- Tokyo Electron Limited
- Tamaki Takeyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
AUTOMATIC PRESSURE CONTROL DEVICE, FILM FORMING APPARATUS AND PRESS...
- Publication number 20240052950
- Publication date Feb 15, 2024
- TOKYO ELECTRON LIMITED
- Satoshi YONEKURA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
METHOD AND DEVICE FOR SUBSTRATE PROCESSING
- Publication number 20220220606
- Publication date Jul 14, 2022
- TOKYO ELECTRON LIMITED
- Tamaki TAKEYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM THICKNESS MEASURING APPARATUS AND FILM THICKNESS MEASURING MET...
- Publication number 20210285096
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Masato SHINADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS, CLEANING METHOD FOR FILM FORMING APPARATUS...
- Publication number 20180108518
- Publication date Apr 19, 2018
- TOKYO ELECTRON LIMITED
- Naotaka Noro
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM, AND SUBSTRATE PROCESSI...
- Publication number 20120118231
- Publication date May 17, 2012
- TOKYO ELECTRON LIMITED
- Toshio TAKAGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF SUBSTRATE TREATMENT, RECORDING MEDIUM AND SUBSTRATE TREAT...
- Publication number 20090220692
- Publication date Sep 3, 2009
- TOKYO ELECTRON LIMITED
- Toshio Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM
- Publication number 20090061643
- Publication date Mar 5, 2009
- TOKYO ELECTRON LIMITED
- Tamaki Takeyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Tamaki Takeyama

Person

Patents Grantslast 30 patents

Film thickness measuring apparatus and film thickness measuring met...

Film forming apparatus, cleaning method for film forming apparatus...

Substrate processing method and recording medium

Patents Applicationslast 30 patents

AUTOMATIC PRESSURE CONTROL DEVICE, FILM FORMING APPARATUS AND PRESS...

METHOD AND DEVICE FOR SUBSTRATE PROCESSING

FILM THICKNESS MEASURING APPARATUS AND FILM THICKNESS MEASURING MET...

FILM FORMING APPARATUS, CLEANING METHOD FOR FILM FORMING APPARATUS...

SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM, AND SUBSTRATE PROCESSI...

METHOD OF SUBSTRATE TREATMENT, RECORDING MEDIUM AND SUBSTRATE TREAT...

SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM