TREA

Tamaki Yuasa

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  • Hyogo, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Processing device
    • Patent number 8,785,809
    • Issue date Jul 22, 2014
    • Tokyo Electron Limited
    • Toshihisa Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Processing apparatus
    • Patent number 8,485,127
    • Issue date Jul 16, 2013
    • Tokyo Electron Limited
    • Shinya Nishimoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus and plasma processing method
    • Patent number 8,267,040
    • Issue date Sep 18, 2012
    • Tokyo Electron Limited
    • Kiyotaka Ishibashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Processing device
    • Patent number 8,173,928
    • Issue date May 8, 2012
    • Tokyo Electron Limited
    • Toshihisa Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 8,052,887
    • Issue date Nov 8, 2011
    • Tokyo Electron Limited
    • Toshihisa Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Microwave introducing antenna for a plasma processing apparatus
    • Patent number D563950
    • Issue date Mar 11, 2008
    • Tokyo Electron Limited
    • Jun Yamashita
    • D14 - Recording, communication, or information retrieval equipment

Patents Applicationslast 30 patents

  • Information Patent Application

    PROCESSING DEVICE
    • Publication number 20120204983
    • Publication date Aug 16, 2012
    • TOKYO ELECTRON LIMITED
    • Toshihisa Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20100116789
    • Publication date May 13, 2010
    • TOKYO ELECTRON LIMITED
    • Toshihisa Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MICROWAVE INTRODUCTION DEVICE
    • Publication number 20090266487
    • Publication date Oct 29, 2009
    • TOKYO ELECTRON LIMITED
    • Caizhong Tian
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    PROCESSING APPARATUS
    • Publication number 20090133835
    • Publication date May 28, 2009
    • TOKYO ELECTRON LIMITED
    • Shinya Nishimoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESSING DEVICE
    • Publication number 20090008369
    • Publication date Jan 8, 2009
    • TOKYO ELECTRON LIMITED
    • Toshihisa Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma Processing Apparatus and Plasma Processing Method
    • Publication number 20070264441
    • Publication date Nov 15, 2007
    • TOKYO ELECTRON LIMITED
    • Kiyotaka Ishibashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Shield Body and Vacuum Processing Apparatus
    • Publication number 20070240979
    • Publication date Oct 18, 2007
    • TOKYO ELECTRON LIMITED
    • Toshihisa Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Processing Apparatus
    • Publication number 20070221130
    • Publication date Sep 27, 2007
    • TOKYO ELECTRON LIMITED
    • Toshihisa Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate processing apparatus
    • Publication number 20070163502
    • Publication date Jul 19, 2007
    • Toshihisa Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20070137575
    • Publication date Jun 21, 2007
    • Tokyo Electron Limited
    • Tadahiro Ohmi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate processing apparatus
    • Publication number 20040168768
    • Publication date Sep 2, 2004
    • TOKYO ELECTRON LIMITED
    • Toshihisa Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...