Tamal Mukherjee

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Atomic layer etch and ion beam etch patterning
- Patent number 12,080,562
- Issue date Sep 3, 2024
- Lam Research Corporation
- Samantha Siamhwa Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer etching for subtractive metal etch
- Patent number 11,935,758
- Issue date Mar 19, 2024
- Lam Research Corporation
- Wenbing Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer etching and smoothing of refractory metals and other h...
- Patent number 11,450,513
- Issue date Sep 20, 2022
- Lam Research Corporation
- Wenbing Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High energy atomic layer etching
- Patent number 10,763,083
- Issue date Sep 1, 2020
- Lam Research Corporation
- Wenbing Yang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF CLEANING CHAMBER COMPONENTS WITH METAL ETCH RESIDUES
- Publication number 20240304428
- Publication date Sep 12, 2024
- LAM RESEARCH CORPORATION
- Wenbing YANG
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
HIGH ENERGY ATOMIC LAYER ETCHING
- Publication number 20240274408
- Publication date Aug 15, 2024
- LAM RESEARCH CORPORATION
- Wenbing Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER ETCHING FOR SUBTRACTIVE METAL ETCH
- Publication number 20240186150
- Publication date Jun 6, 2024
- LAM RESEARCH CORPORATION
- Wenbing YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL ETCH
- Publication number 20240021435
- Publication date Jan 18, 2024
- LAM RESEARCH CORPORATION
- Yiwen FAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING A CHAMBER
- Publication number 20230230819
- Publication date Jul 20, 2023
- LAM RESEARCH CORPORATION
- Ran LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER ETCHING AND SMOOTHING OF REFRACTORY METALS AND OTHER H...
- Publication number 20220392747
- Publication date Dec 8, 2022
- LAM RESEARCH CORPORATION
- Wenbing Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL ETCH NONVOLATILE MATERIALS FOR MRAM PATTERNING
- Publication number 20220376174
- Publication date Nov 24, 2022
- LAM RESEARCH CORPORATION
- Wenbing YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER ETCH AND ION BEAM ETCH PATTERNING
- Publication number 20220254649
- Publication date Aug 11, 2022
- LAM RESEARCH CORPORATION
- Samantha SiamHwa TAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER ETCHING FOR SUBTRACTIVE METAL ETCH
- Publication number 20220199422
- Publication date Jun 23, 2022
- LAM RESEARCH CORPORATION
- Wenbing YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER ETCHING AND SMOOTHING OF REFRACTORY METALS AND OTHER H...
- Publication number 20210005425
- Publication date Jan 7, 2021
- LAM RESEARCH CORPORATION
- Wenbing Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH ENERGY ATOMIC LAYER ETCHING
- Publication number 20200402770
- Publication date Dec 24, 2020
- LAM RESEARCH CORPORATION
- Wenbing Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH ENERGY ATOMIC LAYER ETCHING
- Publication number 20190108982
- Publication date Apr 11, 2019
- LAM RESEARCH CORPORATION
- Wenbing Yang
- H01 - BASIC ELECTRIC ELEMENTS

Tamal Mukherjee

Person

Patents Grantslast 30 patents

Atomic layer etch and ion beam etch patterning

Atomic layer etching for subtractive metal etch

Atomic layer etching and smoothing of refractory metals and other h...

High energy atomic layer etching

Patents Applicationslast 30 patents

METHOD OF CLEANING CHAMBER COMPONENTS WITH METAL ETCH RESIDUES

HIGH ENERGY ATOMIC LAYER ETCHING

ATOMIC LAYER ETCHING FOR SUBTRACTIVE METAL ETCH

METAL ETCH

METHOD FOR CLEANING A CHAMBER

ATOMIC LAYER ETCHING AND SMOOTHING OF REFRACTORY METALS AND OTHER H...

CHEMICAL ETCH NONVOLATILE MATERIALS FOR MRAM PATTERNING

ATOMIC LAYER ETCH AND ION BEAM ETCH PATTERNING

ATOMIC LAYER ETCHING FOR SUBTRACTIVE METAL ETCH

ATOMIC LAYER ETCHING AND SMOOTHING OF REFRACTORY METALS AND OTHER H...

HIGH ENERGY ATOMIC LAYER ETCHING

HIGH ENERGY ATOMIC LAYER ETCHING