Tamara Byrne

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Process control using process data and yield data
- Patent number 8,271,122
- Issue date Sep 18, 2012
- MKS Instruments, Inc.
- Tamara Byrne
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
PROCESS CONTROL USING PROCESS DATA AND YIELD DATA
- Publication number 20120035755
- Publication date Feb 9, 2012
- MKS Instruments, Inc.
- Tamara Byrne
- G05 - CONTROLLING REGULATING