Tamer Mohamed Tawfik Ahmed Mohamed Elazhary

Person

New Canaan, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Optical designs of miniaturized overlay measurement system
- Patent number 12,140,872
- Issue date Nov 12, 2024
- ASML Holding N.V.
- Mohamed Swillam
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
On chip sensor for wafer overlay measurement
- Patent number 12,066,762
- Issue date Aug 20, 2024
- ASML Holding N.V. & ASML Netherlands B.V.
- Mohamed Swillam
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus, metrology systems, phased array illuminatio...
- Patent number 11,994,808
- Issue date May 28, 2024
- ASML Holding N.V.
- Mohamed Swillam
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus, metrology systems, phased array illuminatio...
- Patent number 11,966,169
- Issue date Apr 23, 2024
- ASML Holding N.V.
- Mohamed Swillam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus, metrology system, and illumination systems...
- Patent number 11,789,368
- Issue date Oct 17, 2023
- ASML Holding N.V.
- Yuxiang Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Compact alignment sensor arrangements
- Patent number 11,531,280
- Issue date Dec 20, 2022
- ASML Holding N.V.
- Tamer Mohamed Tawfik Ahmed Mohamed Elazhary
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sensor apparatus and method for lithographic measurements
- Patent number 11,526,091
- Issue date Dec 13, 2022
- ASML Holding N.V.
- Tamer Mohamed Tawfik Ahmed Mohamed Elazhary
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology sensor, lithographic apparatus and method for manufacturi...
- Patent number 11,181,835
- Issue date Nov 23, 2021
- ASML Netherlands B.V.
- Sebastianus Adrianus Goorden
- G01 - MEASURING TESTING
Information Patent Grant
Alignment sensor apparatus for process sensitivity compensation
- Patent number 11,175,593
- Issue date Nov 16, 2021
- ASML Netherlands B.V.
- Simon Reinald Huisman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ON CHIP SENSOR FOR WAFER OVERLAY MEASUREMENT
- Publication number 20240361703
- Publication date Oct 31, 2024
- ASML Holding N.V.
- Mohamed SWILLAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL DESIGNS OF MINIATURIZED OVERLAY MEASUREMENT SYSTEM
- Publication number 20230059471
- Publication date Feb 23, 2023
- ASML Holding N.V.
- Mohamed SWILLAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, METROLOGY SYSTEM, AND ILLUMINATION SYSTEMS...
- Publication number 20220373895
- Publication date Nov 24, 2022
- ASML Holding N.V.
- Yuxiang LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY MARK STRUCTURE AND METHOD OF DETERMINING METROLOGY MARK S...
- Publication number 20220350268
- Publication date Nov 3, 2022
- ASML Holding N.V.
- Tamer Mohamed Tawfik Ahmed Mohamed ELAZHARY
- G01 - MEASURING TESTING
Information Patent Application
ON CHIP SENSOR FOR WAFER OVERLAY MEASUREMENT
- Publication number 20220283516
- Publication date Sep 8, 2022
- ASML Holding N.V.
- Mohamed SWILLAM
- G02 - OPTICS
Information Patent Application
METROLOGY SYSTEM AND METHOD
- Publication number 20220283515
- Publication date Sep 8, 2022
- ASML Holding N.V.
- Tamer Mohamed Tawfik Ahmed Mohamed ELAZHARY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ON CHIP WAFER ALIGNMENT SENSOR
- Publication number 20220268574
- Publication date Aug 25, 2022
- ASML Holding N.V.
- Tamer Mohamed Tawfik Ahmed Mohamed ELAZHARY
- G01 - MEASURING TESTING
Information Patent Application
SENSOR APPARATUS AND METHOD FOR LITHOGRAPHIC MEASUREMENTS
- Publication number 20220179331
- Publication date Jun 9, 2022
- ASML Holding N.V.
- Tamer Mohamed Tawfik Ahmed Mohamed ELAZHARY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR AND METHOD OF SIMULTANEOUSLY ACQUIRING PARALLEL ALIGN...
- Publication number 20220100109
- Publication date Mar 31, 2022
- ASML Holding N.V.
- Tamer Mohamed Tawfik Ahmed Mohamed ELAZHARY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPACT ALIGNMENT SENSOR ARRANGEMENTS
- Publication number 20210318627
- Publication date Oct 14, 2021
- ASML Holding N.V.
- Tamer Mohamed Tawfik Ahmed Mohamed ELAZHARY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology Sensor, Lithographic Apparatus and Method for Manufacturi...
- Publication number 20210157248
- Publication date May 27, 2021
- ASML NETHERLANDS B.V.
- Sebastianus Adrianus GOORDEN
- G01 - MEASURING TESTING
Information Patent Application
Alignment Sensor Apparatus for Process Sensivity Compensation
- Publication number 20210132509
- Publication date May 6, 2021
- ASML NETHERLANDS B.V.
- Simon Reinald HUISMAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus, Metrology Systems, Phased Array Illuminatio...
- Publication number 20210095957
- Publication date Apr 1, 2021
- ASML Holding N.V.
- Mohamed SWILLAM
- H01 - BASIC ELECTRIC ELEMENTS

Tamer Mohamed Tawfik Ahmed Mohamed Elazhary

Person

Patents Grantslast 30 patents

Optical designs of miniaturized overlay measurement system

On chip sensor for wafer overlay measurement

Lithographic apparatus, metrology systems, phased array illuminatio...

Lithographic apparatus, metrology systems, phased array illuminatio...

Lithographic apparatus, metrology system, and illumination systems...

Compact alignment sensor arrangements

Sensor apparatus and method for lithographic measurements

Metrology sensor, lithographic apparatus and method for manufacturi...

Alignment sensor apparatus for process sensitivity compensation

Patents Applicationslast 30 patents

ON CHIP SENSOR FOR WAFER OVERLAY MEASUREMENT

OPTICAL DESIGNS OF MINIATURIZED OVERLAY MEASUREMENT SYSTEM

LITHOGRAPHIC APPARATUS, METROLOGY SYSTEM, AND ILLUMINATION SYSTEMS...

METROLOGY MARK STRUCTURE AND METHOD OF DETERMINING METROLOGY MARK S...

ON CHIP SENSOR FOR WAFER OVERLAY MEASUREMENT

METROLOGY SYSTEM AND METHOD

ON CHIP WAFER ALIGNMENT SENSOR

SENSOR APPARATUS AND METHOD FOR LITHOGRAPHIC MEASUREMENTS

APPARATUS FOR AND METHOD OF SIMULTANEOUSLY ACQUIRING PARALLEL ALIGN...

COMPACT ALIGNMENT SENSOR ARRANGEMENTS

Metrology Sensor, Lithographic Apparatus and Method for Manufacturi...

Alignment Sensor Apparatus for Process Sensivity Compensation

Lithographic Apparatus, Metrology Systems, Phased Array Illuminatio...