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Tamihiro Kobayashi
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Vacuum processing apparatus, vacuum processing system and vacuum pr...
Patent number
10,867,819
Issue date
Dec 15, 2020
Tokyo Electron Limited
Takayuki Yamagishi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Shower plate having projections and plasma CVD apparatus using same
Patent number
7,799,134
Issue date
Sep 21, 2010
ASM Japan K.K.
Naoto Tsuji
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate-processing apparatus with buffer mechanism and substrate-...
Patent number
7,690,881
Issue date
Apr 6, 2010
ASM Japan K.K.
Takayuki Yamagishi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR CORRECTING POSITIONAL...
Publication number
20230253223
Publication date
Aug 10, 2023
TOKYO ELECTRON LIMITED
Tamihiro KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20210225618
Publication date
Jul 22, 2021
TOKYO ELECTRON LIMITED
Sumi TANAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum Processing Apparatus, Vacuum Processing System and Vacuum Pr...
Publication number
20190385873
Publication date
Dec 19, 2019
TOKYO ELECTRON LIMITED
Takayuki YAMAGISHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Multiple-Substrate Transfer Apparatus and Multiple-Substrate Proces...
Publication number
20100147396
Publication date
Jun 17, 2010
ASM JAPAN K.K.
Takayuki Yamagishi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate-processing apparatus with buffer mechanism and substrate-...
Publication number
20080056854
Publication date
Mar 6, 2008
ASM JAPAN K.K.
Takayuki Yamagishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Shower plate having projections and plasma CVD apparatus using same
Publication number
20050183666
Publication date
Aug 25, 2005
ASM JAPAN K.K.
Naoto Tsuji
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...