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Tamio Endo
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Kawasaki, JP
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last 30 patents
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Patent Grant
System for carrying-in of cassette for substrates to be processed
Patent number
5,971,696
Issue date
Oct 26, 1999
Tokyo Electron Limited
Tamio Endo
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma processing apparatus
Patent number
5,474,643
Issue date
Dec 12, 1995
Tokyo Electron Limited
Junichi Arami
H01 - BASIC ELECTRIC ELEMENTS