Tammo UITTERDIJK

Person

Wilton, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method to manufacture nano ridges in hard ceramic coatings
- Patent number 12,111,581
- Issue date Oct 8, 2024
- ASML Holding N.V.
- Mehmet Ali Akbas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus, substrate table, and method
- Patent number 11,988,971
- Issue date May 21, 2024
- ASML Holding N.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Chucks and clamps for holding objects of a lithographic apparatus a...
- Patent number RE49066
- Issue date May 10, 2022
- ASML Holding N.V.
- Raymond Wilhelmus Louis Lafarre
Information Patent Grant
Burls with altered surface topography for holding an object in lith...
- Patent number 11,270,906
- Issue date Mar 8, 2022
- ASML Holding N.V.
- Mehmet Ali Akbas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and method
- Patent number 10,908,518
- Issue date Feb 2, 2021
- ASML Holding N.V.
- Santiago E. Delpuerto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chucks and clamps for holding objects of a lithographic apparatus a...
- Patent number 10,324,383
- Issue date Jun 18, 2019
- ASML Holding N.V.
- Raymond Wilhelmus Louis Lafarre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic clamp and a method for manufacturing the same
- Patent number 10,310,391
- Issue date Jun 4, 2019
- ASML Holding N.V.
- Matthew Lipson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic clamp and a method for manufacturing the same
- Patent number 10,274,842
- Issue date Apr 30, 2019
- ASML Holding N.V.
- Matthew Lipson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and method
- Patent number 10,001,713
- Issue date Jun 19, 2018
- ASML Holding N.V.
- Santiago E. Del Puerto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS
- Publication number 20240369947
- Publication date Nov 7, 2024
- ASML Holding N.V.
- Mehmet Ali AKBAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR WAFER TABLE AND METHODS OF MANUFACTURING THEREOF
- Publication number 20240248415
- Publication date Jul 25, 2024
- ASML Holding N.V.
- Shahab SHERVIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLAMP ELECTRODE MODIFICATION FOR IMPROVED OVERLAY
- Publication number 20240176254
- Publication date May 30, 2024
- ASML NETHERLANDS B.V.
- Keane Michael LEVY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBS...
- Publication number 20230384694
- Publication date Nov 30, 2023
- ASML NETHERLANDS B.V.
- Abdullah ALIKHAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUB MICRON PARTICLE DETECTION ON BURL TOPS BY APPLYING A VARIABLE V...
- Publication number 20230314962
- Publication date Oct 5, 2023
- ASML Holding N.V.
- Tammo UITTERDIJK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECT HOLDER, ELECTROSTATIC SHEET AND METHOD FOR MAKING AN ELECTRO...
- Publication number 20230236518
- Publication date Jul 27, 2023
- ASML NETHERLANDS B.V.
- Bastiaan Lambertus Wilhelmus Marinus VAN DE VEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WAFER CLAMP HARD BURL PRODUCTION AND REFURBISHMENT
- Publication number 20230031443
- Publication date Feb 2, 2023
- ASML Holding N.V.
- Matthew LIPSON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND METHOD
- Publication number 20220082953
- Publication date Mar 17, 2022
- ASML Holding N.V.
- Matthew LIPSON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS
- Publication number 20210405539
- Publication date Dec 30, 2021
- ASML Holding N.V.
- Mehmet Ali AKBAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BURLS WITH ALTERED SURFACE TOPOGRAPHY FOR HOLDING AN OBJECT IN LITH...
- Publication number 20210202293
- Publication date Jul 1, 2021
- ASML Holding N.V.
- Mehmet Ali AKBAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHUCKS AND CLAMPS FOR HOLDING OBJECTS OF A LITHOGRAPHIC APPARATUS A...
- Publication number 20180321602
- Publication date Nov 8, 2018
- ASML Holding N.V.
- Raymond Wilhelmus Louis LAFARRE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20180267414
- Publication date Sep 20, 2018
- ASML Holding N.V.
- Santiago E. DELPUERTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
An Electrostatic Clamp and a Method for Manufacturing the Same
- Publication number 20170242345
- Publication date Aug 24, 2017
- ASML Holding N.V.
- Matthew LIPSON
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
Lithographic Apparatus and Method
- Publication number 20150370180
- Publication date Dec 24, 2015
- ASML Holding N.V.
- Santiago E. DEL PUERTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tammo UITTERDIJK

Person

Patents Grantslast 30 patents

Method to manufacture nano ridges in hard ceramic coatings

Lithographic apparatus, substrate table, and method

Chucks and clamps for holding objects of a lithographic apparatus a...

Burls with altered surface topography for holding an object in lith...

Lithographic apparatus and method

Chucks and clamps for holding objects of a lithographic apparatus a...

Electrostatic clamp and a method for manufacturing the same

Electrostatic clamp and a method for manufacturing the same

Lithographic apparatus and method

Patents Applicationslast 30 patents

METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS

MODULAR WAFER TABLE AND METHODS OF MANUFACTURING THEREOF

CLAMP ELECTRODE MODIFICATION FOR IMPROVED OVERLAY

VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBS...

SUB MICRON PARTICLE DETECTION ON BURL TOPS BY APPLYING A VARIABLE V...

OBJECT HOLDER, ELECTROSTATIC SHEET AND METHOD FOR MAKING AN ELECTRO...

WAFER CLAMP HARD BURL PRODUCTION AND REFURBISHMENT

LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND METHOD

A METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS

BURLS WITH ALTERED SURFACE TOPOGRAPHY FOR HOLDING AN OBJECT IN LITH...

CHUCKS AND CLAMPS FOR HOLDING OBJECTS OF A LITHOGRAPHIC APPARATUS A...

LITHOGRAPHIC APPARATUS AND METHOD

An Electrostatic Clamp and a Method for Manufacturing the Same

Lithographic Apparatus and Method