Tammo UITTERDIJK

Person

De Bilt, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,146,142
- Issue date Dec 4, 2018
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,606,448
- Issue date Mar 28, 2017
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, control system and device manufacturing method
- Patent number 9,482,967
- Issue date Nov 1, 2016
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,442,388
- Issue date Sep 13, 2016
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lithographic apparatus and a method for determining a polarization...
- Patent number 9,170,498
- Issue date Oct 27, 2015
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,913,225
- Issue date Dec 16, 2014
- ASML Netherlands B.V.
- Tammo Uitterdijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,675,173
- Issue date Mar 18, 2014
- ASML Netherlands B.V.
- Paulus Martinus Maria Liebregts
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, control system and device manufacturing method
- Patent number 8,045,134
- Issue date Oct 25, 2011
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,013,978
- Issue date Sep 6, 2011
- ASML Netherlands B.V.
- Tammo Uitterdijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device and device manufacturing method
- Patent number 7,924,403
- Issue date Apr 12, 2011
- ASML Netherlands B.V.
- Paulus Martinus Maria Liebregts
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method, and mask havin...
- Patent number 7,843,552
- Issue date Nov 30, 2010
- ASML Netherlands B.V.
- Richard Joseph Bruls
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of reducing a wave front aberration, and computer program pr...
- Patent number 7,580,113
- Issue date Aug 25, 2009
- ASML Netherlands B.V.
- Wim Tjibbo Tel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, aberration correction device and device man...
- Patent number 7,538,952
- Issue date May 26, 2009
- ASML Netherlands B.V.
- Tammo Uitterdijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and methods for use thereof
- Patent number 7,538,875
- Issue date May 26, 2009
- ASML Netherlands B.V.
- Remco Marcel Van Dijk
- G01 - MEASURING TESTING
Information Patent Grant
Lens element, lithographic apparatus, device manufacturing method,...
- Patent number 7,535,644
- Issue date May 19, 2009
- ASML Netherlands B.V.
- Wilhelmus Petrus De Boeij
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,405,805
- Issue date Jul 29, 2008
- ASML Netherlands B.V.
- Tammo Uitterdijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing methods, mask and meth...
- Patent number 7,379,154
- Issue date May 27, 2008
- ASML Netherlands, B.V.
- Richard Joseph Bruls
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 7,375,799
- Issue date May 20, 2008
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, aberration correction device and device man...
- Patent number 7,372,633
- Issue date May 13, 2008
- ASML Netherlands B.V.
- Tammo Uitterdijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,239,370
- Issue date Jul 3, 2007
- ASML Netherlands B.V.
- Albert Johannes Maria Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for bonding a pellicle to a patterning device and patterning...
- Patent number 7,136,152
- Issue date Nov 14, 2006
- ASML Netherlands B.V.
- Richard Joseph Bruls
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190086819
- Publication date Mar 21, 2019
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170160650
- Publication date Jun 8, 2017
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140347642
- Publication date Nov 27, 2014
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140071420
- Publication date Mar 13, 2014
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Lithographic Apparatus and a Method for Determining a Polarization...
- Publication number 20130176547
- Publication date Jul 11, 2013
- ASML NETHERLANDS B.V.
- Marcus Adrianus VAN DE KERKHOF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, CONTROL SYSTEM AND DEVICE MANUFACTURING METHOD
- Publication number 20120008113
- Publication date Jan 12, 2012
- ASML NETHERLANDS B.V.
- Marcus Adrianus VAN DE KERKHOF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110279796
- Publication date Nov 17, 2011
- ASML NETHERLANDS B.V.
- Tammo Uitterdijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110159441
- Publication date Jun 30, 2011
- ASML NETHERLANDS B.V.
- Paulus Martinus Maria LIEBREGTS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Passive reticle tool, a lithographic apparatus and a method of patt...
- Publication number 20100182582
- Publication date Jul 22, 2010
- ASML NETHERLANDS B.V,
- Marcus Adrianus Van De Kerkhof
- G01 - MEASURING TESTING
Information Patent Application
Lithographic projection system and projection lens polarization sensor
- Publication number 20100118288
- Publication date May 13, 2010
- Marcus Adrianus Van De Kerkhof
- G01 - MEASURING TESTING
Information Patent Application
Lithographic Apparatus, Method for Determining at Least One Polariz...
- Publication number 20100045956
- Publication date Feb 25, 2010
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- G01 - MEASURING TESTING
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20080259296
- Publication date Oct 23, 2008
- ASML NETHERLANDS B.V.
- Tammo Uitterdijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, aberration correction device and device man...
- Publication number 20080212183
- Publication date Sep 4, 2008
- ASML NETHERLANDS B.V.
- Tammo Uitterdijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing methods, mask and meth...
- Publication number 20080137049
- Publication date Jun 12, 2008
- ASML NETHERLANDS B.V.
- Johannes Christiaan Maria Jasper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, aberration correction device and device man...
- Publication number 20080024874
- Publication date Jan 31, 2008
- ASML NETHERLANDS B.V.
- Tammo Uitterdijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of reducing a wave front aberration, and computer program pr...
- Publication number 20070296938
- Publication date Dec 27, 2007
- ASML NETHERLANDS B.V.
- Wim Tjibbo Tel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, control system and device manufacturing method
- Publication number 20070211233
- Publication date Sep 13, 2007
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lens element, lithographic apparatus, device manufacturing method,...
- Publication number 20070035845
- Publication date Feb 15, 2007
- ASML NETHERLANDS B.V.
- Wilhelmus Petrus De Boeij
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and a method for determining a polarization...
- Publication number 20060203221
- Publication date Sep 14, 2006
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus
- Publication number 20060192937
- Publication date Aug 31, 2006
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device and device manufacturing method
- Publication number 20060158628
- Publication date Jul 20, 2006
- ASML NETHERLANDS B.V.
- Paulus Martinus Maria Liebregts
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060139589
- Publication date Jun 29, 2006
- ASML NETHERLANDS B.V.
- Tammo Uitterdijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for bonding a pellicle to a patterning device and patterning...
- Publication number 20060109448
- Publication date May 25, 2006
- ASML NETHERLANDS B.V.
- Richard Joseph Bruls
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method, and mask havin...
- Publication number 20050280789
- Publication date Dec 22, 2005
- ASML NETHERLANDS B.V.
- Richard Joseph Bruls
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and methods for use thereof
- Publication number 20050206879
- Publication date Sep 22, 2005
- ASML NETHERLANDS B.V.
- Remco Marcel Van Dijk
- G01 - MEASURING TESTING
Information Patent Application
Lithographic apparatus, device manufacturing methods, mask and meth...
- Publication number 20050140949
- Publication date Jun 30, 2005
- ASML NETHERLANDS B.V.
- Johannes Christiaan Maria Jasper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20040174509
- Publication date Sep 9, 2004
- ASML NETHERLANDS B.V.
- Albert Johannes Maria Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tammo UITTERDIJK

Person

Patents Grantslast 30 patents

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus, control system and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and a method for determining a polarization...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus, control system and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device and device manufacturing method

Lithographic apparatus, device manufacturing method, and mask havin...

Method of reducing a wave front aberration, and computer program pr...

Lithographic apparatus, aberration correction device and device man...

Lithographic apparatus and methods for use thereof

Lens element, lithographic apparatus, device manufacturing method,...

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing methods, mask and meth...

Lithographic apparatus

Lithographic apparatus, aberration correction device and device man...

Lithographic apparatus and device manufacturing method

Method for bonding a pellicle to a patterning device and patterning...

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Lithographic Apparatus and a Method for Determining a Polarization...

LITHOGRAPHIC APPARATUS, CONTROL SYSTEM AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Passive reticle tool, a lithographic apparatus and a method of patt...

Lithographic projection system and projection lens polarization sensor

Lithographic Apparatus, Method for Determining at Least One Polariz...

Lithographic apparatus and device manufacturing method

Lithographic apparatus, aberration correction device and device man...

Lithographic apparatus, device manufacturing methods, mask and meth...

Lithographic apparatus, aberration correction device and device man...

Method of reducing a wave front aberration, and computer program pr...

Lithographic apparatus, control system and device manufacturing method

Lens element, lithographic apparatus, device manufacturing method,...

Lithographic apparatus and a method for determining a polarization...

Lithographic apparatus

Lithographic apparatus and device and device manufacturing method

Lithographic apparatus and device manufacturing method

Method for bonding a pellicle to a patterning device and patterning...

Lithographic apparatus, device manufacturing method, and mask havin...

Lithographic apparatus and methods for use thereof

Lithographic apparatus, device manufacturing methods, mask and meth...

Lithographic apparatus and device manufacturing method