Tamotsu ABE

Person

Oyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 10,764,986
- Issue date Sep 1, 2020
- Gigaphoton Inc.
- Shinji Nagai
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 10,314,152
- Issue date Jun 4, 2019
- Gigaphoton Inc.
- Shinji Nagai
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 10,172,225
- Issue date Jan 1, 2019
- Gigaphoton Inc.
- Toru Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generating apparatus
- Patent number 10,126,657
- Issue date Nov 13, 2018
- Gigaphoton Inc.
- Hirokazu Hosoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light generating apparatus
- Patent number 10,102,938
- Issue date Oct 16, 2018
- Gigaphoton Inc.
- Takayuki Yabu
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,986,629
- Issue date May 29, 2018
- Gigaphoton Inc.
- Toru Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,942,973
- Issue date Apr 10, 2018
- Gigaphoton Inc.
- Tamotsu Abe
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Extreme ultraviolet light generation device
- Patent number 9,872,372
- Issue date Jan 16, 2018
- Gigaphoton Inc.
- Atsushi Ueda
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Extreme ultraviolet light generation apparatus and extreme ultravio...
- Patent number 9,578,730
- Issue date Feb 21, 2017
- Gigaphoton Inc.
- Tamotsu Abe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,510,433
- Issue date Nov 29, 2016
- Gigaphoton Inc.
- Shinji Nagai
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device and target supply method
- Patent number 9,310,686
- Issue date Apr 12, 2016
- Gigaphoton Inc.
- Takayuki Yabu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 8,872,142
- Issue date Oct 28, 2014
- Gigaphoton Inc.
- Shinji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser device with optical element module on separate plate
- Patent number 8,817,838
- Issue date Aug 26, 2014
- Gigaphoton Inc.
- Tamotsu Abe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Collector mirror exchanging apparatus and method for extreme ultrav...
- Patent number 8,804,902
- Issue date Aug 12, 2014
- Gigaphoton Inc.
- Hiroshi Someya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Chamber apparatus and extreme ultraviolet light generation system
- Patent number 8,759,804
- Issue date Jun 24, 2014
- Gigaphoton Inc.
- Toshihiro Nishisaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target generation device
- Patent number 8,705,035
- Issue date Apr 22, 2014
- Gigaphoton Inc.
- Takanobu Ishihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 8,698,116
- Issue date Apr 15, 2014
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 8,698,112
- Issue date Apr 15, 2014
- Gigaphoton Inc.
- Takayuki Yabu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 8,629,417
- Issue date Jan 14, 2014
- Gigaphoton Inc.
- Shinji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation system
- Patent number 8,624,208
- Issue date Jan 7, 2014
- Gigaphoton Inc.
- Shinji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,569,723
- Issue date Oct 29, 2013
- Gigaphoton Inc.
- Shinji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,558,202
- Issue date Oct 15, 2013
- Gigaphoton Inc.
- Tatsuya Yanagida
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for cleaning collector mirror in EUV light gen...
- Patent number 8,536,550
- Issue date Sep 17, 2013
- Gigaphoton Inc.
- Takeshi Asayama
- B08 - CLEANING
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 8,536,551
- Issue date Sep 17, 2013
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,507,883
- Issue date Aug 13, 2013
- Gigaphoton Inc.
- Akira Endo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for and method of withdrawing ions in EUV light productio...
- Patent number 8,492,738
- Issue date Jul 23, 2013
- Gigaphoton, Inc.
- Yoshifumi Ueno
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 8,481,984
- Issue date Jul 9, 2013
- Gigaphoton Inc.
- Masato Moriya
Information Patent Grant
Collector mirror exchanging apparatus and method for extreme ultrav...
- Patent number 8,477,412
- Issue date Jul 2, 2013
- Gigaphoton Inc.
- Hiroshi Someya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,450,706
- Issue date May 28, 2013
- Gigaphoton Inc.
- Tamotsu Abe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,445,876
- Issue date May 21, 2013
- Gigaphoton Inc.
- Takashi Suganuma
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
- Publication number 20180253010
- Publication date Sep 6, 2018
- Gigaphoton Inc.
- Hirokazu HOSODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
- Publication number 20180240562
- Publication date Aug 23, 2018
- Gigaphoton Inc.
- Takayuki YABU
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20180146536
- Publication date May 24, 2018
- Gigaphoton Inc.
- Toru SUZUKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20170215267
- Publication date Jul 27, 2017
- Gigaphoton Inc.
- Tamotsu ABE
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
- Publication number 20170094767
- Publication date Mar 30, 2017
- Gigaphoton Inc.
- Atsushi UEDA
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20170064800
- Publication date Mar 2, 2017
- Gigaphoton Inc.
- Shinji NAGAI
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20170055336
- Publication date Feb 23, 2017
- Gigaphoton Inc.
- Shinji NAGAI
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20160234920
- Publication date Aug 11, 2016
- GIGAPHOTON INC.
- Toru SUZUKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIO...
- Publication number 20160135276
- Publication date May 12, 2016
- Gigaphoton Inc.
- Tamotsu ABE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20150008345
- Publication date Jan 8, 2015
- Gigaphoton Inc.
- Shinji NAGAI
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
METHOD AND APPARATUS FOR CLEANING COLLECTOR MIRROR IN EUV LIGHT GEN...
- Publication number 20140166046
- Publication date Jun 19, 2014
- GIGAPHOTON INC.
- Takeshi Asayama
- B08 - CLEANING
Information Patent Application
TARGET SUPPLY DEVICE AND TARGET SUPPLY METHOD
- Publication number 20140034759
- Publication date Feb 6, 2014
- GIGAPHOTON INC.
- Takayuki YABU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20140001369
- Publication date Jan 2, 2014
- GIGAPHOTON INC.
- Toshihiro NISHISAKA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
- Publication number 20130240762
- Publication date Sep 19, 2013
- GIGAPHOTON INC.
- Masato MORIYA
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
COLLECTOR MIRROR EXCHANGING APPARATUS AND METHOD FOR EXTREME ULTRAV...
- Publication number 20130221247
- Publication date Aug 29, 2013
- GIGAPHOTON INC.
- Hiroshi Someya
- B82 - NANO-TECHNOLOGY
Information Patent Application
TARGET GENERATION DEVICE
- Publication number 20130186976
- Publication date Jul 25, 2013
- GIGAPHOTON INC.
- Takanobu ISHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD FOR CLEANING OPTICAL ELEMENT OF EUV LIGHT SOURCE DEVICE AND...
- Publication number 20120298134
- Publication date Nov 29, 2012
- GIGAPHOTON INC.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20120267553
- Publication date Oct 25, 2012
- Gigaphoton Inc.
- Shinji NAGAI
- G01 - MEASURING TESTING
Information Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
- Publication number 20120228527
- Publication date Sep 13, 2012
- Komatsu Ltd./Gigaphoton, Inc.
- Tamotsu ABE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20120223257
- Publication date Sep 6, 2012
- GIGAPHOTON, INC.
- Shinji NAGAI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR AND METHOD OF WITHDRAWING IONS IN EUV LIGHT PRODUCTIO...
- Publication number 20120217414
- Publication date Aug 30, 2012
- GIGAPHOTON INC.
- Yoshifumi UENO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20120217422
- Publication date Aug 30, 2012
- GIGAPHOTON INC.
- Takayuki YABU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20120091893
- Publication date Apr 19, 2012
- Gigaphoton, Inc
- Tatsuya YANAGIDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20110309260
- Publication date Dec 22, 2011
- Toshihiro Nishisaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20110266467
- Publication date Nov 3, 2011
- Gigaphoton Inc.
- Shinji NAGAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER SYSTEM
- Publication number 20110261844
- Publication date Oct 27, 2011
- GIGAPHOTON INC.
- Tamotsu ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20110226745
- Publication date Sep 22, 2011
- Shinji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20110204249
- Publication date Aug 25, 2011
- Shinji NAGAI
- G01 - MEASURING TESTING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20110180734
- Publication date Jul 28, 2011
- GIGAPHOTON INC.
- Masato MORIYA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS AND NOZZLE PROTECTION DE...
- Publication number 20110174996
- Publication date Jul 21, 2011
- Gigaphoton, Inc
- Hiroshi SOMEYA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Tamotsu ABE

Person

Patents Grantslast 30 patents

Extreme ultraviolet light generation apparatus

Extreme ultraviolet light generation apparatus

Extreme ultraviolet light generation apparatus

Extreme ultraviolet light generating apparatus

Extreme ultraviolet light generating apparatus

Extreme ultraviolet light generation apparatus

Extreme ultraviolet light generation apparatus

Extreme ultraviolet light generation device

Extreme ultraviolet light generation apparatus and extreme ultravio...

Extreme ultraviolet light generation apparatus

Target supply device and target supply method

Extreme ultraviolet light generation apparatus

Laser device with optical element module on separate plate

Collector mirror exchanging apparatus and method for extreme ultrav...

Chamber apparatus and extreme ultraviolet light generation system

Target generation device

Extreme ultra violet light source apparatus

Extreme ultraviolet light generation apparatus

Extreme ultraviolet light generation apparatus

Extreme ultraviolet light generation system

Extreme ultraviolet light source apparatus

Extreme ultraviolet light source apparatus

Method and apparatus for cleaning collector mirror in EUV light gen...

Extreme ultra violet light source apparatus

Extreme ultraviolet light source apparatus

Apparatus for and method of withdrawing ions in EUV light productio...

Extreme ultra violet light source apparatus

Collector mirror exchanging apparatus and method for extreme ultrav...

Extreme ultraviolet light source apparatus

Extreme ultraviolet light source apparatus

Patents Applicationslast 30 patents

EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIO...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

METHOD AND APPARATUS FOR CLEANING COLLECTOR MIRROR IN EUV LIGHT GEN...

TARGET SUPPLY DEVICE AND TARGET SUPPLY METHOD

CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS

COLLECTOR MIRROR EXCHANGING APPARATUS AND METHOD FOR EXTREME ULTRAV...

TARGET GENERATION DEVICE

METHOD FOR CLEANING OPTICAL ELEMENT OF EUV LIGHT SOURCE DEVICE AND...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

APPARATUS FOR AND METHOD OF WITHDRAWING IONS IN EUV LIGHT PRODUCTIO...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

LASER SYSTEM

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS AND NOZZLE PROTECTION DE...