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Taner OZEL
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Fremont, CA, US
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last 30 patents
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Patent Application
METAL-BASED LINER PROTECTION FOR HIGH ASPECT RATIO PLASMA ETCH
Publication number
20230298896
Publication date
Sep 21, 2023
LAM RESEARCH CORPORATION
Gregory Clinton Veber
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
CONTROL OF MASK CD
Publication number
20230230807
Publication date
Jul 20, 2023
LAM RESEARCH CORPORATION
Beibei Jiang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ELECTROSTATIC CHUCK WITH FLEXIBLE WAFER TEMPERATURE CONTROL
Publication number
20180286642
Publication date
Oct 4, 2018
LAM RESEARCH CORPORATION
Alexander MATYUSHKIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...