Taner OZEL

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Fremont, CA, US

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Patents Applicationslast 30 patents

Information Patent Application
SILICON ETCH WITH ORGANOCHLORIDE
- Publication number 20240429063
- Publication date Dec 26, 2024
- LAM RESEARCH CORPORATION
- Ilya PISKUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL-BASED LINER PROTECTION FOR HIGH ASPECT RATIO PLASMA ETCH
- Publication number 20230298896
- Publication date Sep 21, 2023
- LAM RESEARCH CORPORATION
- Gregory Clinton Veber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL OF MASK CD
- Publication number 20230230807
- Publication date Jul 20, 2023
- LAM RESEARCH CORPORATION
- Beibei Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH FLEXIBLE WAFER TEMPERATURE CONTROL
- Publication number 20180286642
- Publication date Oct 4, 2018
- LAM RESEARCH CORPORATION
- Alexander MATYUSHKIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...