Tang-Kuei Chang

Person

Tainan City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Metal loss prevention using implantation
- Patent number 12,068,195
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Li-Chieh Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for chemical mechanical polishing and forming interconnect...
- Patent number 12,002,684
- Issue date Jun 4, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ji Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal loss prevention using implantation
- Patent number 11,710,659
- Issue date Jul 25, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Li-Chieh Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical polishing slurry composition, method for chemic...
- Patent number 11,658,065
- Issue date May 23, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ji Cui
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Structure and formation method of semiconductor device with conduct...
- Patent number 11,532,514
- Issue date Dec 20, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Li-Chieh Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for chemical mechanical polishing and forming interconnect...
- Patent number 11,508,585
- Issue date Nov 22, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ji Cui
- B24 - GRINDING POLISHING
Information Patent Grant
Ion implant process for defect elimination in metal layer planariza...
- Patent number 11,450,565
- Issue date Sep 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal loss prevention using implantation
- Patent number 11,211,289
- Issue date Dec 28, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Li-Chieh Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and formation method of semiconductor device with conduct...
- Patent number 10,957,587
- Issue date Mar 23, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Li-Chieh Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal loss prevention using implantation
- Patent number 10,643,892
- Issue date May 5, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Li-Chieh Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer edge trimming tool using abrasive tape
- Patent number 9,931,726
- Issue date Apr 3, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tang-Kuei Chang
- B24 - GRINDING POLISHING
Information Patent Grant
Lithography tool with backside polisher
- Patent number 9,829,806
- Issue date Nov 28, 2017
- Taiwan Semiconductor Manufacturing Company Limited
- Tang-Kuei Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer polishing tool using abrasive tape
- Patent number 9,339,912
- Issue date May 17, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tang-Kuei Chang
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
RETAINING RING FOR CHEMICAL-MECHANICAL POLISHING
- Publication number 20240420978
- Publication date Dec 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jeng-Chi LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING TOOL AND METHOD
- Publication number 20240395537
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-hsiang Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANT PROCESS FOR DEFECT ELIMINATION IN METAL LAYER PLANARIZA...
- Publication number 20240363404
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Cheng CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR CHEMICAL MECHANICAL POLISHING AND FORMING INTERCONNECT...
- Publication number 20240290629
- Publication date Aug 29, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- JI CUI
- B24 - GRINDING POLISHING
Information Patent Application
Metal Loss Prevention Using Implantation
- Publication number 20230317519
- Publication date Oct 5, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Li-Chieh Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR CHEMICAL MECHANICAL POLISHING AND FORMING INTERCONNECT...
- Publication number 20230082084
- Publication date Mar 16, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- JI CUI
- B24 - GRINDING POLISHING
Information Patent Application
ION IMPLANT PROCESS FOR DEFECT ELIMINATION IN METAL LAYER PLANARIZA...
- Publication number 20220359277
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Cheng CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metal Loss Prevention Using Implantation
- Publication number 20220122884
- Publication date Apr 21, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Li-Chieh Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL MECHANICAL POLISHING SLURRY COMPOSITION, METHOD FOR CHEMIC...
- Publication number 20210391208
- Publication date Dec 16, 2021
- Ji Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR CHEMICAL MECHANICAL POLISHING AND FORMING INTERCONNECT...
- Publication number 20210391186
- Publication date Dec 16, 2021
- Ji Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SLURRY COMPOSITION AND METHOD FOR POLISHING AND INTEGRATGED CIRCUIT
- Publication number 20210371702
- Publication date Dec 2, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- JI CUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANT PROCESS FOR DEFECT ELIMINATION IN METAL LAYER PLANARIZA...
- Publication number 20210305092
- Publication date Sep 30, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Cheng CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure and Formation Method of Semiconductor Device with Conduct...
- Publication number 20210210383
- Publication date Jul 8, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Li-Chieh Wu
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Structure and Formation Method of Semiconductor Device with Conduct...
- Publication number 20200043786
- Publication date Feb 6, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Li-Chieh Wu
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Metal Loss Prevention Using Implantation
- Publication number 20190385909
- Publication date Dec 19, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Li-Chieh Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metal Loss Prevention Using Implantation
- Publication number 20190371664
- Publication date Dec 5, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Li-Chieh Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY TOOL WITH BACKSIDE POLISHER
- Publication number 20150262831
- Publication date Sep 17, 2015
- Taiwan Semiconductor Manufacturing Company Limited
- TANG-KUEI CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Edge Trimming Tool Using Abrasive Tape
- Publication number 20140213152
- Publication date Jul 31, 2014
- Tang-Kuei Chang
- B24 - GRINDING POLISHING
Information Patent Application
Wafer Polishing Tool Using Abrasive Tape
- Publication number 20140213153
- Publication date Jul 31, 2014
- Tang-Kuei Chang
- B24 - GRINDING POLISHING

Tang-Kuei Chang

Person

Patents Grantslast 30 patents

Metal loss prevention using implantation

Methods for chemical mechanical polishing and forming interconnect...

Metal loss prevention using implantation

Chemical mechanical polishing slurry composition, method for chemic...

Structure and formation method of semiconductor device with conduct...

Methods for chemical mechanical polishing and forming interconnect...

Ion implant process for defect elimination in metal layer planariza...

Metal loss prevention using implantation

Structure and formation method of semiconductor device with conduct...

Metal loss prevention using implantation

Wafer edge trimming tool using abrasive tape

Lithography tool with backside polisher

Wafer polishing tool using abrasive tape

Patents Applicationslast 30 patents

RETAINING RING FOR CHEMICAL-MECHANICAL POLISHING

PROCESSING TOOL AND METHOD

ION IMPLANT PROCESS FOR DEFECT ELIMINATION IN METAL LAYER PLANARIZA...

METHODS FOR CHEMICAL MECHANICAL POLISHING AND FORMING INTERCONNECT...

Metal Loss Prevention Using Implantation

METHODS FOR CHEMICAL MECHANICAL POLISHING AND FORMING INTERCONNECT...

ION IMPLANT PROCESS FOR DEFECT ELIMINATION IN METAL LAYER PLANARIZA...

Metal Loss Prevention Using Implantation

CHEMICAL MECHANICAL POLISHING SLURRY COMPOSITION, METHOD FOR CHEMIC...

METHODS FOR CHEMICAL MECHANICAL POLISHING AND FORMING INTERCONNECT...

SLURRY COMPOSITION AND METHOD FOR POLISHING AND INTEGRATGED CIRCUIT

ION IMPLANT PROCESS FOR DEFECT ELIMINATION IN METAL LAYER PLANARIZA...

Structure and Formation Method of Semiconductor Device with Conduct...

Structure and Formation Method of Semiconductor Device with Conduct...

Metal Loss Prevention Using Implantation

Metal Loss Prevention Using Implantation

LITHOGRAPHY TOOL WITH BACKSIDE POLISHER

Wafer Edge Trimming Tool Using Abrasive Tape

Wafer Polishing Tool Using Abrasive Tape