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Tanlin K. Dickey
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Chemical mechanical polishing head assembly having floating wafer c...
Patent number
7,044,838
Issue date
May 16, 2006
Ebara Corporation
Gerard S. Maloney
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer scrubbing brush core
Patent number
6,543,084
Issue date
Apr 8, 2003
Lam Research Corporation
Tanlin Dickey
B08 - CLEANING
Information
Patent Grant
Chemical mechanical polishing head having floating wafer retaining...
Patent number
6,309,290
Issue date
Oct 30, 2001
Mitsubishi Materials Corporation
Huey-Ming Wang
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer scrubbing brush core
Patent number
6,240,588
Issue date
Jun 5, 2001
Lam Research Corporation
Tanlin Dickey
B08 - CLEANING
Information
Patent Grant
Chemical mechanical polishing head assembly having floating wafer c...
Patent number
6,231,428
Issue date
May 15, 2001
Mitsubishi Materials Corporation
Gerard S. Maloney
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Chemical mechanical polishing head assembly having floating wafer c...
Publication number
20040171331
Publication date
Sep 2, 2004
Gerald S. Maloney
B24 - GRINDING POLISHING
Information
Patent Application
Chemical mechanical polishing head assembly having floating wafer c...
Publication number
20020173242
Publication date
Nov 21, 2002
MITSUBISHI MATERIALS CORPORATION
Huey-Ming Wang
B24 - GRINDING POLISHING
Information
Patent Application
Wafer scrubbing brush core
Publication number
20010022008
Publication date
Sep 20, 2001
Tanlin Dickey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Chemical mechanical polishing head assembly having floating wafer c...
Publication number
20010007810
Publication date
Jul 12, 2001
MITSUBISHI MATERIALS CORPORATION
Gerard S. Moloney
B24 - GRINDING POLISHING