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Substrate support bushing
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Patent number 9,991,153
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Issue date Jun 5, 2018
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Applied Materials, Inc.
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Tao Hou
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H01 - BASIC ELECTRIC ELEMENTS
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Gas heater
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Patent number 9,766,022
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Issue date Sep 19, 2017
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Applied Materials, Inc.
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Tao Hou
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F28 - HEAT EXCHANGE IN GENERAL
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Substrate support bushing
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Patent number 8,911,151
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Issue date Dec 16, 2014
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Applied Materials, Inc.
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Tao Hou
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Gas heater
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Patent number 8,309,874
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Issue date Nov 13, 2012
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Applied Materials, Inc.
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Tao Hou
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F28 - HEAT EXCHANGE IN GENERAL