Tao-Hsin CHEN

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Patents Grantslast 30 patents

Information Patent Grant
EUV wafer defect improvement and method of collecting nonconductive...
- Patent number 12,032,303
- Issue date Jul 9, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tao-Hsin Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus and method using the same
- Patent number 11,740,564
- Issue date Aug 29, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tao-Hsin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle and method of detecting intactness of reticle stage using t...
- Patent number 11,221,562
- Issue date Jan 11, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Yu Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV wafer defect improvement and method of collecting nonconductive...
- Patent number 11,150,564
- Issue date Oct 19, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tao-Hsin Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle stage and method for using the same
- Patent number 10,663,871
- Issue date May 26, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Yu Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EUV WAFER DEFECT IMPROVEMENT AND METHOD OF COLLECTING NONCONDUCTIVE...
- Publication number 20230375951
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tao-Hsin CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV WAFER DEFECT IMPROVEMENT AND METHOD OF COLLECTING NONCONDUCTIVE...
- Publication number 20220100105
- Publication date Mar 31, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tao-Hsin CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD USING THE SAME
- Publication number 20210397102
- Publication date Dec 23, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tao-Hsin CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE AND METHOD OF DETECTING INTACTNESS OF RETICLE STAGE USING T...
- Publication number 20200292932
- Publication date Sep 17, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Yu LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE STAGE AND METHOD FOR USING THE SAME
- Publication number 20200033717
- Publication date Jan 30, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Yu LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY