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Patents Grantslast 30 patents

Information Patent Grant
Microelectromechanical capacitive pressure sensor having a valve po...
- Patent number 11,767,218
- Issue date Sep 26, 2023
- Teknologian tutkimuskeskus VTT Oy
- Tapio Pernu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
REAL-TIME GAIN CALIBRATION OF A SENSOR
- Publication number 20230050553
- Publication date Feb 16, 2023
- Teknologian Tutkimuskeskus VTT Oy
- Tapio PERNU
- G01 - MEASURING TESTING
Information Patent Application
A lens for a microelectromechanical system mirror
- Publication number 20230023127
- Publication date Jan 26, 2023
- Teknologian Tutkimuskeskus VTT Oy
- Tapio Pernu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Driving circuits for a piezoelectric microelectromechanical system...
- Publication number 20220411255
- Publication date Dec 29, 2022
- Teknologian Tutkimuskeskus VTT Oy
- Tapio Pernu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Pressure sensor
- Publication number 20220048761
- Publication date Feb 17, 2022
- Teknologian Tutkimuskeskus VTT Oy
- Tapio Pernu
- B81 - MICRO-STRUCTURAL TECHNOLOGY