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Tariq Fasheh
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Beverly, MA, US
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Patents Grants
last 30 patents
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Patent Grant
Load lock control
Patent number
7,381,969
Issue date
Jun 3, 2008
Axcelis Technologies, Inc.
Tariq Fasheh
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Load lock control
Publication number
20070246658
Publication date
Oct 25, 2007
Axcelis Technologies, Inc.
Tariq Fasheh
H01 - BASIC ELECTRIC ELEMENTS