Tariq Fasheh

Person

  • Beverly, MA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Load lock control

    • Patent number 7,381,969
    • Issue date Jun 3, 2008
    • Axcelis Technologies, Inc.
    • Tariq Fasheh
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Load lock control

    • Publication number 20070246658
    • Publication date Oct 25, 2007
    • Axcelis Technologies, Inc.
    • Tariq Fasheh
    • H01 - BASIC ELECTRIC ELEMENTS