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Hyogo, JP
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last 30 patents
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Patent Grant
Baffle plate, apparatus for producing the same, method of producing...
Patent number
7,648,610
Issue date
Jan 19, 2010
Tokyo Electron Limited
Taro Komiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Gas processing apparatus baffle member, and gas processing method
Patent number
6,436,193
Issue date
Aug 20, 2002
Tokyo Electron Limited
Shigeru Kasai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Baffle plate, apparatus for producing the same, method of producing...
Publication number
20030094135
Publication date
May 22, 2003
Taro Komiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...