Taro TEZUKA

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Light source apparatus and method of controlling the same
- Patent number 9,113,507
- Issue date Aug 18, 2015
- Canon Kabushiki Kaisha
- Taro Tezuka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Measurement apparatus
- Patent number 8,830,480
- Issue date Sep 9, 2014
- Canon Kabushiki Kaisha
- Taro Tezuka
- G01 - MEASURING TESTING
Information Patent Grant
Measurement method and exposure apparatus
- Patent number 8,174,670
- Issue date May 8, 2012
- Canon Kabushiki Kaisha
- Taro Tezuka
- G01 - MEASURING TESTING
Information Patent Grant
Wavefront-aberration measuring method and device, and exposure appa...
- Patent number 7,724,376
- Issue date May 25, 2010
- Canon Kabushiki Kaisha
- Taro Tezuka
- G01 - MEASURING TESTING
Information Patent Grant
Measurement method and apparatus, exposure apparatus, and device ma...
- Patent number 7,518,735
- Issue date Apr 14, 2009
- Canon Kabushiki Kaisha
- Taro Tezuka
- G01 - MEASURING TESTING
Information Patent Grant
Measurement method and apparatus, exposure apparatus, and device ma...
- Patent number 7,463,365
- Issue date Dec 9, 2008
- Canon Kabushiki Kaisha
- Taro Tezuka
- G01 - MEASURING TESTING
Information Patent Grant
Measurement method and apparatus, exposure apparatus, and device ma...
- Patent number 7,428,059
- Issue date Sep 23, 2008
- Canon Kabushiki Kaisha
- Taro Tezuka
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT APPARATUS
- Publication number 20120116718
- Publication date May 10, 2012
- Canon Kabushiki Kaisha
- Taro TEZUKA
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT METHOD AND EXPOSURE APPARATUS
- Publication number 20090268181
- Publication date Oct 29, 2009
- Canon Kabushiki Kaisha
- Taro Tezuka
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT METHOD AND APPARATUS, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20080309947
- Publication date Dec 18, 2008
- Canon Kabushiki Kaisha
- Taro TEZUKA
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT METHOD AND APPARATUS, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20070285671
- Publication date Dec 13, 2007
- Taro Tezuka
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT METHOD AND APPARATUS, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20070153294
- Publication date Jul 5, 2007
- Taro Tezuka
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT METHOD AND APPARATUS, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20070146688
- Publication date Jun 28, 2007
- Taro Tezuka
- G01 - MEASURING TESTING