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Utsunomiya-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Light source apparatus and method of controlling the same
Patent number
9,113,507
Issue date
Aug 18, 2015
Canon Kabushiki Kaisha
Taro Tezuka
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Measurement apparatus
Patent number
8,830,480
Issue date
Sep 9, 2014
Canon Kabushiki Kaisha
Taro Tezuka
G01 - MEASURING TESTING
Information
Patent Grant
Measurement method and exposure apparatus
Patent number
8,174,670
Issue date
May 8, 2012
Canon Kabushiki Kaisha
Taro Tezuka
G01 - MEASURING TESTING
Information
Patent Grant
Wavefront-aberration measuring method and device, and exposure appa...
Patent number
7,724,376
Issue date
May 25, 2010
Canon Kabushiki Kaisha
Taro Tezuka
G01 - MEASURING TESTING
Information
Patent Grant
Measurement method and apparatus, exposure apparatus, and device ma...
Patent number
7,518,735
Issue date
Apr 14, 2009
Canon Kabushiki Kaisha
Taro Tezuka
G01 - MEASURING TESTING
Information
Patent Grant
Measurement method and apparatus, exposure apparatus, and device ma...
Patent number
7,463,365
Issue date
Dec 9, 2008
Canon Kabushiki Kaisha
Taro Tezuka
G01 - MEASURING TESTING
Information
Patent Grant
Measurement method and apparatus, exposure apparatus, and device ma...
Patent number
7,428,059
Issue date
Sep 23, 2008
Canon Kabushiki Kaisha
Taro Tezuka
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
MEASUREMENT APPARATUS
Publication number
20120116718
Publication date
May 10, 2012
Canon Kabushiki Kaisha
Taro TEZUKA
G01 - MEASURING TESTING
Information
Patent Application
MEASUREMENT METHOD AND EXPOSURE APPARATUS
Publication number
20090268181
Publication date
Oct 29, 2009
Canon Kabushiki Kaisha
Taro Tezuka
G01 - MEASURING TESTING
Information
Patent Application
MEASUREMENT METHOD AND APPARATUS, EXPOSURE APPARATUS, AND DEVICE MA...
Publication number
20080309947
Publication date
Dec 18, 2008
Canon Kabushiki Kaisha
Taro TEZUKA
G01 - MEASURING TESTING
Information
Patent Application
MEASUREMENT METHOD AND APPARATUS, EXPOSURE APPARATUS, AND DEVICE MA...
Publication number
20070285671
Publication date
Dec 13, 2007
Taro Tezuka
G01 - MEASURING TESTING
Information
Patent Application
MEASUREMENT METHOD AND APPARATUS, EXPOSURE APPARATUS, AND DEVICE MA...
Publication number
20070153294
Publication date
Jul 5, 2007
Taro Tezuka
G01 - MEASURING TESTING
Information
Patent Application
MEASUREMENT METHOD AND APPARATUS, EXPOSURE APPARATUS, AND DEVICE MA...
Publication number
20070146688
Publication date
Jun 28, 2007
Taro Tezuka
G01 - MEASURING TESTING