Taro Yamamoto

Person

Koshi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,198,961
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Tsuyoshi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,869,789
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Tsuyoshi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polyurethane elastic fiber, yarn package of same, and product inclu...
- Patent number 11,781,249
- Issue date Oct 10, 2023
- Asahi Kasei Kabushiki Kaisha
- Hitoshi Sato
- D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,664,254
- Issue date May 30, 2023
- Tokyo Electron Limited
- Tsuyoshi Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid processing apparatus
- Patent number 11,031,261
- Issue date Jun 8, 2021
- Tokyo Electron Limited
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 10,840,079
- Issue date Nov 17, 2020
- Tokyo Electron Limited
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid processing apparatus
- Patent number 10,649,334
- Issue date May 12, 2020
- Tokyo Electron Limited
- Koki Yoshimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polishing cleaning mechanism, substrate processing apparatus, and s...
- Patent number 10,328,546
- Issue date Jun 25, 2019
- Tokyo Electron Limited
- Akihiro Kubo
- B24 - GRINDING POLISHING
Information Patent Grant
Developing apparatus, developing method and storage medium
- Patent number 10,289,004
- Issue date May 14, 2019
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 10,128,136
- Issue date Nov 13, 2018
- Tokyo Electron Limited
- Masahiro Fukuda
- B08 - CLEANING
Information Patent Grant
Developing method, developing apparatus and storage medium
- Patent number 10,120,285
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid processing apparatus
- Patent number 10,014,190
- Issue date Jul 3, 2018
- Tokyo Electron Limited
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and storag...
- Patent number 9,947,556
- Issue date Apr 17, 2018
- Tokyo Electron Limited
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method
- Patent number 9,716,002
- Issue date Jul 25, 2017
- Tokyo Electron Limited
- Yasushi Takiguchi
- B08 - CLEANING
Information Patent Grant
Polishing cleaning mechanism, substrate processing apparatus, and s...
- Patent number 9,669,510
- Issue date Jun 6, 2017
- Tokyo Electron Limited
- Akihiro Kubo
- B24 - GRINDING POLISHING
Information Patent Grant
Developing apparatus
- Patent number 9,625,821
- Issue date Apr 18, 2017
- Tokyo Electron Limited
- Masahiro Fukuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing apparatus, developing method and storage medium
- Patent number 9,575,411
- Issue date Feb 21, 2017
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate liquid treatment apparatus and substrate liquid treatment...
- Patent number 9,570,327
- Issue date Feb 14, 2017
- Tokyo Electron Limited
- Masahiro Fukuda
- B08 - CLEANING
Information Patent Grant
Developing method, developing apparatus and storage medium
- Patent number 9,568,829
- Issue date Feb 14, 2017
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing treatment apparatus and developing treatment method
- Patent number 9,470,979
- Issue date Oct 18, 2016
- Tokyo Electron Limited
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing treatment apparatus and developing treatment method
- Patent number 9,304,398
- Issue date Apr 5, 2016
- Tokyo Electron Limited
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method for developing apparatus
- Patent number 9,256,131
- Issue date Feb 9, 2016
- Tokyo Electron Limited
- Hirofumi Takeguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus, coating film forming method, and...
- Patent number 9,214,363
- Issue date Dec 15, 2015
- Tokyo Electron Limited
- Hideharu Kyouda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cleaning apparatus and cleaning method, coater/developer and coatin...
- Patent number 9,120,120
- Issue date Sep 1, 2015
- Tokyo Electron Limited
- Taro Yamamoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating and developing system and coating and developing method
- Patent number 9,052,610
- Issue date Jun 9, 2015
- Tokyo Electron Limited
- Seiki Ishida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate cleaning method and substrate cleaning apparatus
- Patent number 8,980,013
- Issue date Mar 17, 2015
- Tokyo Electron Limited
- Kousuke Yoshihara
- B08 - CLEANING
Information Patent Grant
Polyurethane urea elastic fiber
- Patent number 8,920,922
- Issue date Dec 30, 2014
- Asahi Kasei Fibers Corporation
- Taro Yamamoto
- D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information Patent Grant
Film forming method, film forming apparatus and pattern forming method
- Patent number 8,889,337
- Issue date Nov 18, 2014
- Tokyo Electron Limited
- Hitoshi Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method and developing apparatus
- Patent number 8,865,396
- Issue date Oct 21, 2014
- Tokyo Electron Limited
- Hirofumi Takeguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cleaning apparatus and cleaning method, coater/developer and coatin...
- Patent number 8,851,092
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240079256
- Publication date Mar 7, 2024
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220165597
- Publication date May 26, 2022
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220165596
- Publication date May 26, 2022
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE WARPAGE CORRECTION METHOD, COMPUTER STORAGE MEDIUM, AND S...
- Publication number 20210039221
- Publication date Feb 11, 2021
- Tokyo Electron Limited
- Nozomu KANETAKE
- B24 - GRINDING POLISHING
Information Patent Application
Polyurethane Elastic Fiber, Yarn Package of Same, and Product Inclu...
- Publication number 20200190702
- Publication date Jun 18, 2020
- Asahi Kasei Kabushiki Kaisha
- Hitoshi Sato
- D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20190049845
- Publication date Feb 14, 2019
- TOKYO ELECTRON LIMITED
- Koki Yoshimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Liquid Processing Apparatus
- Publication number 20180308719
- Publication date Oct 25, 2018
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Substrate Processing Method and Sto...
- Publication number 20180151343
- Publication date May 31, 2018
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20180047592
- Publication date Feb 15, 2018
- TOKYO ELECTRON LIMITED
- Masahiro Fukuda
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
POLISHING CLEANING MECHANISM, SUBSTRATE PROCESSING APPARATUS, AND S...
- Publication number 20170225289
- Publication date Aug 10, 2017
- TOKYO ELECTRON LIMITED
- Akihiro KUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM
- Publication number 20170090291
- Publication date Mar 30, 2017
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20170045821
- Publication date Feb 16, 2017
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...
- Publication number 20160314958
- Publication date Oct 27, 2016
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- B08 - CLEANING
Information Patent Application
DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD
- Publication number 20160202609
- Publication date Jul 14, 2016
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS
- Publication number 20160026086
- Publication date Jan 28, 2016
- TOKYO ELECTRON LIMITED
- Masahiro FUKUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE LIQUID TREATMENT APPARATUS AND SUBSTRATE LIQUID TREATMENT...
- Publication number 20150318193
- Publication date Nov 5, 2015
- Tokyo Electron Limited
- Masahiro FUKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polishing Cleaning Mechanism, Substrate Processing Apparatus, and S...
- Publication number 20150133032
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Akihiro KUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20150036110
- Publication date Feb 5, 2015
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM
- Publication number 20150036109
- Publication date Feb 5, 2015
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND STORAG...
- Publication number 20150027492
- Publication date Jan 29, 2015
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20150027503
- Publication date Jan 29, 2015
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS AND CLEANING METHOD, COATER/DEVELOPER AND COATIN...
- Publication number 20140352736
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVELOPING METHOD FOR DEVELOPING APPARATUS
- Publication number 20140347639
- Publication date Nov 27, 2014
- Hirofumi TAKEGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...
- Publication number 20140102474
- Publication date Apr 17, 2014
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD
- Publication number 20140071411
- Publication date Mar 13, 2014
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING FILM FORMING METHOD, AND...
- Publication number 20130293856
- Publication date Nov 7, 2013
- Hideharu KYOUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING METHOD
- Publication number 20130194557
- Publication date Aug 1, 2013
- TOKYO ELECTRON LIMITED
- Taro YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20130118533
- Publication date May 16, 2013
- TOKYO ELECTRON LIMITED
- Yasushi Takiguchi
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
- Publication number 20120234362
- Publication date Sep 20, 2012
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B08 - CLEANING
Information Patent Application
Coating Film Forming Apparatus, Use Of Coating Film Forming Apparat...
- Publication number 20120183693
- Publication date Jul 19, 2012
- TOKYO ELECTRON LIMITED
- Nobuhiro OGATA
- H01 - BASIC ELECTRIC ELEMENTS

Taro Yamamoto

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Polyurethane elastic fiber, yarn package of same, and product inclu...

Substrate processing apparatus and substrate processing method

Liquid processing apparatus

Substrate processing apparatus, substrate processing method and sto...

Liquid processing apparatus

Polishing cleaning mechanism, substrate processing apparatus, and s...

Developing apparatus, developing method and storage medium

Liquid processing apparatus and liquid processing method

Developing method, developing apparatus and storage medium

Liquid processing apparatus

Substrate cleaning apparatus, substrate cleaning method, and storag...

Substrate cleaning method

Polishing cleaning mechanism, substrate processing apparatus, and s...

Developing apparatus

Developing apparatus, developing method and storage medium

Substrate liquid treatment apparatus and substrate liquid treatment...

Developing method, developing apparatus and storage medium

Developing treatment apparatus and developing treatment method

Developing treatment apparatus and developing treatment method

Developing method for developing apparatus

Coating and developing apparatus, coating film forming method, and...

Cleaning apparatus and cleaning method, coater/developer and coatin...

Coating and developing system and coating and developing method

Substrate cleaning method and substrate cleaning apparatus

Polyurethane urea elastic fiber

Film forming method, film forming apparatus and pattern forming method

Developing method and developing apparatus

Cleaning apparatus and cleaning method, coater/developer and coatin...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE WARPAGE CORRECTION METHOD, COMPUTER STORAGE MEDIUM, AND S...

Polyurethane Elastic Fiber, Yarn Package of Same, and Product Inclu...

LIQUID PROCESSING APPARATUS

Liquid Processing Apparatus

Substrate Processing Apparatus, Substrate Processing Method and Sto...

LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD

POLISHING CLEANING MECHANISM, SUBSTRATE PROCESSING APPARATUS, AND S...

DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM

DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...

DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD

DEVELOPING APPARATUS

SUBSTRATE LIQUID TREATMENT APPARATUS AND SUBSTRATE LIQUID TREATMENT...

Polishing Cleaning Mechanism, Substrate Processing Apparatus, and S...

DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM

DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND STORAG...

LIQUID PROCESSING APPARATUS

CLEANING APPARATUS AND CLEANING METHOD, COATER/DEVELOPER AND COATIN...

DEVELOPING METHOD FOR DEVELOPING APPARATUS

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...

DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD

COATING AND DEVELOPING APPARATUS, COATING FILM FORMING METHOD, AND...

DEVELOPING METHOD

LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS

Coating Film Forming Apparatus, Use Of Coating Film Forming Apparat...