Tarou Sugihara

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Immersion lithographic apparatus rinsing outer contour of substrate...
- Patent number 8,941,808
- Issue date Jan 27, 2015
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, exposure apparatus, and method for pro...
- Patent number 8,040,489
- Issue date Oct 18, 2011
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing method, exposure apparatus, and method for pro...
- Publication number 20120008112
- Publication date Jan 12, 2012
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing method, exposure apparatus, and method for pro...
- Publication number 20080246931
- Publication date Oct 9, 2008
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate Processing Method, Exposure Apparatus, and Method For Pro...
- Publication number 20080143980
- Publication date Jun 19, 2008
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing method, exposure apparatus, and method for pro...
- Publication number 20070242248
- Publication date Oct 18, 2007
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Image processing method and unit, detecting method and unit, and ex...
- Publication number 20040042648
- Publication date Mar 4, 2004
- Nikon Corporation
- Kouji Yoshidda
- G06 - COMPUTING CALCULATING COUNTING