Tasuku Yano

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Patents Grantslast 30 patents

Information Patent Grant
Scanning electron beam device with focus adjustment based on accele...
- Patent number 9,644,955
- Issue date May 9, 2017
- Hitachi High-Technologies Corporation
- Tasuku Yano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,312,091
- Issue date Apr 12, 2016
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device
- Patent number 8,735,814
- Issue date May 27, 2014
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Localized static charge distribution precision measurement method a...
- Patent number 7,928,384
- Issue date Apr 19, 2011
- Hitachi High-Technologies Corporation
- Zhaohui Cheng
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,714,288
- Issue date May 11, 2010
- Hitachi High-Technologies Corporation
- Tasuku Yano
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20150076362
- Publication date Mar 19, 2015
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON BEAM DEVICE AND DIMENSION MEASUREMENT METHOD USIN...
- Publication number 20140339425
- Publication date Nov 20, 2014
- Tasuku Yano
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM DEVICE
- Publication number 20130270435
- Publication date Oct 17, 2013
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Localized static charge distribution precision measurement method a...
- Publication number 20090057557
- Publication date Mar 5, 2009
- Hitachi High-Technologies Corporation
- Zhaohui Cheng
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20080277583
- Publication date Nov 13, 2008
- Hitachi High-Technologies Corporation
- Tasuku Yano
- G01 - MEASURING TESTING