Tateki Watanabe

Follow

Person

Shizuoka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged-particle beam pattern writing method and apparatus and soft...
- Patent number 7,589,335
- Issue date Sep 15, 2009
- Nuflare Technology, Inc.
- Takuya Matsukawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged beam drawing apparatus and charged beam drawing method
- Patent number 7,476,881
- Issue date Jan 13, 2009
- Nuflare Technology, Inc.
- Kiyoshi Hattori
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED-PARTICLE BEAM PATTERN WRITING METHOD AND APPARATUS AND SOFT...
- Publication number 20080011965
- Publication date Jan 17, 2008
- NuFlare Technology, Inc.
- Takuya Matsukawa
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED BEAM DRAWING APPARATUS AND CHARGED BEAM DRAWING METHOD
- Publication number 20070114461
- Publication date May 24, 2007
- Kiyoshi HATTORI
- B82 - NANO-TECHNOLOGY