Tatenori Jinriki

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus and contamination removal method th...
- Patent number 7,375,328
- Issue date May 20, 2008
- Holon Co., LTD
- Akira Yonezawa
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR GENERATING CHARGED P...
- Publication number 20100006756
- Publication date Jan 14, 2010
- Norimichi Anazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus and contamination removal method th...
- Publication number 20060138363
- Publication date Jun 29, 2006
- HOLON CO., LTD.
- Akira Yonezawa
- B08 - CLEANING