Tatsufumi HAMADA

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing semiconductor device for forming metal ele...
- Patent number 9,245,847
- Issue date Jan 26, 2016
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method for suppresing wiring mat...
- Patent number 9,240,379
- Issue date Jan 19, 2016
- Tokyo Electron Limited
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING MANGANESE-CONTAINING FILM
- Publication number 20160326646
- Publication date Nov 10, 2016
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20150126027
- Publication date May 7, 2015
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING MANGANESE-CONTAINING FILM
- Publication number 20150110975
- Publication date Apr 23, 2015
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE...
- Publication number 20150021775
- Publication date Jan 22, 2015
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AN...
- Publication number 20140374904
- Publication date Dec 25, 2014
- Kenji MATSUMOTO
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, STORAGE MEDIUM AND SEMIC...
- Publication number 20140361436
- Publication date Dec 11, 2014
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE, SE...
- Publication number 20140103529
- Publication date Apr 17, 2014
- TOKYO ELECTRON LIMITED
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANGANESE SILICATE FILM FORMING METHOD, PROCESSING SYSTEM, SEMICOND...
- Publication number 20140084466
- Publication date Mar 27, 2014
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Tatsufumi HAMADA

Person

Patents Grantslast 30 patents

Method for manufacturing semiconductor device for forming metal ele...

Semiconductor device manufacturing method for suppresing wiring mat...

Patents Applicationslast 30 patents

METHOD FOR FORMING MANGANESE-CONTAINING FILM

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD FOR FORMING MANGANESE-CONTAINING FILM

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE...

SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AN...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, STORAGE MEDIUM AND SEMIC...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE, SE...

MANGANESE SILICATE FILM FORMING METHOD, PROCESSING SYSTEM, SEMICOND...