Tatsuhiko EMA

Person

Oita-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming method, film forming apparatus, pattern forming method...
- Patent number 8,071,157
- Issue date Dec 6, 2011
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method, film forming apparatus, pattern forming method...
- Patent number 7,799,368
- Issue date Sep 21, 2010
- Kabushiki Kaisha Toshiba
- Shinichi Ito
Information Patent Grant
Film forming method, film forming apparatus, pattern forming method...
- Patent number 7,604,832
- Issue date Oct 20, 2009
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming a pattern and substrate-processing apparatus
- Patent number 7,364,839
- Issue date Apr 29, 2008
- Kabushiki Kaisha Toshiba
- Kei Hayasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Film forming method, film forming apparatus, pattern forming method...
- Patent number 7,312,018
- Issue date Dec 25, 2007
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical liquid processing apparatus for processing a substrate
- Patent number 7,067,033
- Issue date Jun 27, 2006
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Observation device, ultraviolet microscope and observation method
- Patent number 6,842,281
- Issue date Jan 11, 2005
- Nikon Corporation
- Atsushi Tsurumune
- G02 - OPTICS
Information Patent Grant
Film forming method, film forming apparatus, pattern forming method...
- Patent number 6,800,569
- Issue date Oct 5, 2004
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition method, deposition apparatus, and pressure-reduction dry...
- Patent number 6,719,844
- Issue date Apr 13, 2004
- Kabushiki Kaisha Toshiba
- Tatsuhiko Ema
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film-forming method, film-forming apparatus and liquid film drying...
- Patent number 6,709,699
- Issue date Mar 23, 2004
- Kabushiki Kaisha Toshiba
- Tatsuhiko Ema
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Chemical liquid processing apparatus for processing a substrate and...
- Patent number 6,709,531
- Issue date Mar 23, 2004
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Deposition method, deposition apparatus, and pressure-reduction dry...
- Patent number 6,506,453
- Issue date Jan 14, 2003
- Kabushiki Kaisha Toshiba
- Tatsuhiko Ema
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for cleaning the surface of substrate to which residues of r...
- Patent number 6,372,413
- Issue date Apr 16, 2002
- Kabushiki Kaisha Toshiba
- Tatsuhiko Ema
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS, PATTERN FORMING METHOD...
- Publication number 20110212255
- Publication date Sep 1, 2011
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS, PATTERN FORMING METHOD...
- Publication number 20110008545
- Publication date Jan 13, 2011
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20100167213
- Publication date Jul 1, 2010
- Yuriko SEINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20100143849
- Publication date Jun 10, 2010
- Tatsuhiko Ema
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Film forming method, film forming apparatus, pattern forming method...
- Publication number 20080090001
- Publication date Apr 17, 2008
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical liquid processing apparatus for processing a substrate and...
- Publication number 20060151015
- Publication date Jul 13, 2006
- KABUSHIKI KAISHA TOSHIBA
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming method, film forming apparatus, pattern forming method...
- Publication number 20050026456
- Publication date Feb 3, 2005
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming method, film forming apparatus, pattern forming method...
- Publication number 20050022732
- Publication date Feb 3, 2005
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical liquid processing apparatus for processing a substrate and...
- Publication number 20040159398
- Publication date Aug 19, 2004
- KABUSHIKI KAISHA TOSHIBA
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film-forming method, film-forming apparatus and liquid film drying...
- Publication number 20040126501
- Publication date Jul 1, 2004
- Kabushiki Kaisha Toshiba
- Tatsuhiko Ema
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition method, deposition apparatus, and pressure-reduction dry...
- Publication number 20040089229
- Publication date May 13, 2004
- Kabushiki Kaisha Toshiba
- Tatsuhiko Ema
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Film forming method, film forming apparatus, pattern forming method...
- Publication number 20030211756
- Publication date Nov 13, 2003
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Observation device, ultraviolet microscope and observation method
- Publication number 20030202238
- Publication date Oct 30, 2003
- Nikon Corporation
- Atsushi Tsurumune
- G02 - OPTICS
Information Patent Application
Chemical liquid processing apparatus for processing a substrate and...
- Publication number 20030159719
- Publication date Aug 28, 2003
- KABUSHIKI KAISHA TOSHIBA
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition method, deposition apparatus, and pressure-reduction dry...
- Publication number 20030075103
- Publication date Apr 24, 2003
- Kabushiki Kaisha Toshiba
- Tatsuhiko Ema
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Film-forming method, film-forming apparatus and liquid film drying...
- Publication number 20020037367
- Publication date Mar 28, 2002
- Kabushiki Kaisha Toshiba
- Tatsuhiko Ema
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for cleaning the surface of substrate to which residues of r...
- Publication number 20020001781
- Publication date Jan 3, 2002
- Kabushiki Kaisha Toshiba
- Tatsuhiko Ema
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical liquid processing apparatus for processing a substrate and...
- Publication number 20010028920
- Publication date Oct 11, 2001
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition method, deposition apparatus, and pressure-reduction dry...
- Publication number 20010004467
- Publication date Jun 21, 2001
- Kabushiki Kaisha Toshiba
- Tatsuhiko Ema
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Tatsuhiko EMA

Person

Patents Grantslast 30 patents

Film forming method, film forming apparatus, pattern forming method...

Film forming method, film forming apparatus, pattern forming method...

Film forming method, film forming apparatus, pattern forming method...

Method for forming a pattern and substrate-processing apparatus

Film forming method, film forming apparatus, pattern forming method...

Chemical liquid processing apparatus for processing a substrate

Observation device, ultraviolet microscope and observation method

Film forming method, film forming apparatus, pattern forming method...

Deposition method, deposition apparatus, and pressure-reduction dry...

Film-forming method, film-forming apparatus and liquid film drying...

Chemical liquid processing apparatus for processing a substrate and...

Deposition method, deposition apparatus, and pressure-reduction dry...

Method for cleaning the surface of substrate to which residues of r...

Patents Applicationslast 30 patents

FILM FORMING METHOD, FILM FORMING APPARATUS, PATTERN FORMING METHOD...

FILM FORMING METHOD, FILM FORMING APPARATUS, PATTERN FORMING METHOD...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

Film forming method, film forming apparatus, pattern forming method...

Chemical liquid processing apparatus for processing a substrate and...

Film forming method, film forming apparatus, pattern forming method...

Film forming method, film forming apparatus, pattern forming method...

Chemical liquid processing apparatus for processing a substrate and...

Film-forming method, film-forming apparatus and liquid film drying...

Deposition method, deposition apparatus, and pressure-reduction dry...

Film forming method, film forming apparatus, pattern forming method...

Observation device, ultraviolet microscope and observation method

Chemical liquid processing apparatus for processing a substrate and...

Deposition method, deposition apparatus, and pressure-reduction dry...

Film-forming method, film-forming apparatus and liquid film drying...

Method for cleaning the surface of substrate to which residues of r...

Chemical liquid processing apparatus for processing a substrate and...

Deposition method, deposition apparatus, and pressure-reduction dry...