Tatsuhiko Inada

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Kyoto-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and management method
- Patent number 7,292,909
- Issue date Nov 6, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Tatsuhiko Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus for and method of transferring substrate
- Patent number 5,730,574
- Issue date Mar 24, 1998
- Dainippon Screen Mfg. Co., Ltd.
- Hideki Adachi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus and management method
- Publication number 20050130453
- Publication date Jun 16, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Tatsuhiko Inada
- H01 - BASIC ELECTRIC ELEMENTS