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Tatsuhiko Koshida
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Chigasaki-shi, JP
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last 30 patents
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Patent Grant
Switch valve
Patent number
8,181,666
Issue date
May 22, 2012
Ulvac, Inc.
Toshio Negishi
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
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Patent Application
SWITCH VALVE
Publication number
20110048563
Publication date
Mar 3, 2011
ULVAC, Inc.
Toshio NEGISHI
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
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Patent Application
FILM FORMING SOURCE, VAPOR DEPOSITION APPARATUS, AND APPARATUS FOR...
Publication number
20110042208
Publication date
Feb 24, 2011
ULVAC, Inc.
Toshio NEGISHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
VAPOR EMISSION DEVICE, ORGANIC THIN FILM VAPOR DEPOSITION APPARATUS...
Publication number
20100209609
Publication date
Aug 19, 2010
ULVAC, Inc.
Toshio NEGISHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...