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Tatsuhiko Tsujihashi
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Koshi City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
12,074,048
Issue date
Aug 27, 2024
Tokyo Electron Limited
Hiroki Harada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Holding pad for carrying substrate
Patent number
D1012311
Issue date
Jan 23, 2024
Tokyo Electron Limited
Tatsuhiko Tsujihashi
D24 - Medical and laboratory equipment
Information
Patent Grant
Holding pad for carrying substrate
Patent number
D1011550
Issue date
Jan 16, 2024
Tokyo Electron Limited
Tatsuhiko Tsujihashi
D24 - Medical and laboratory equipment
Information
Patent Grant
Substrate processing apparatus and substrate receptacle storage method
Patent number
11,476,143
Issue date
Oct 18, 2022
Tokyo Electron Limited
Akihiro Teramoto
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD
Publication number
20230017389
Publication date
Jan 19, 2023
TOKYO ELECTRON LIMITED
Tatsuhiko TSUJIHASHI
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20210407839
Publication date
Dec 30, 2021
TOKYO ELECTRON LIMITED
Tatsuhiko Tsujihashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20210384058
Publication date
Dec 9, 2021
TOKYO ELECTRON LIMITED
Hiroki HARADA
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE RECEPTACLE STORAGE METHOD
Publication number
20210134636
Publication date
May 6, 2021
TOKYO ELECTRON LIMITED
Akihiro Teramoto
H01 - BASIC ELECTRIC ELEMENTS