Tatsuhiko Yamanaka

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Suita, JP

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Patents Grantslast 30 patents

Information Patent Grant
Extreme ultraviolet light source and extreme ultraviolet light sour...
- Patent number 7,521,702
- Issue date Apr 21, 2009
- Osaka University
- Keiji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser beam focusing apparatus and method for focusing a laser beam
- Patent number 6,676,264
- Issue date Jan 13, 2004
- Osaka University
- Kunioki Mima
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Extreme ultraviolet light source and extreme ultraviolet light sour...
- Publication number 20060133574
- Publication date Jun 22, 2006
- Kansai Technology Licensing Organization Co., Ltd.
- Keiji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser Beam Focusing Apparatus and Method for Focusing a Laser Beam
- Publication number 20040012864
- Publication date Jan 22, 2004
- OSAKA UNIVERSITY
- Kunioki Mima
- G02 - OPTICS