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Tatsuhiko Yoshida

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Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20140020833
    • Publication date Jan 23, 2014
    • Canon ANELVA Corporation
    • Tatsuhiko Yoshida
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE HOLDER AND SUBSTRATE TEMPERATURE CONTROL METHOD
    • Publication number 20110068084
    • Publication date Mar 24, 2011
    • Canon ANELVA Corporation
    • Yoshida Tatsuhiko
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE HOLDER
    • Publication number 20100014208
    • Publication date Jan 21, 2010
    • CANON ANLEVA CORPORATION
    • Yoshida Tatsuhiko
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...