Tatsuhiro Okabe

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Sagamahira-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for forming Ti-containing film by PEALD using TDMAT or TDEAT
- Patent number 9,556,516
- Issue date Jan 31, 2017
- ASM IP Holding B.V.
- Noboru Takamure
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for cleaning reaction chamber using pre-cleaning process
- Patent number 9,142,393
- Issue date Sep 22, 2015
- ASM IP Holding B.V.
- Tatsuhiro Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method for Forming Ti-Containing Film by PEALD using TDMAT or TDEAT
- Publication number 20150099072
- Publication date Apr 9, 2015
- ASM IP HOLDING B.V.
- Noboru Takamure
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method For Cleaning Reaction Chamber Using Pre-cleaning Process
- Publication number 20140345644
- Publication date Nov 27, 2014
- Tatsuhiro Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...